FR2598508B1 - METHOD AND APPARATUS FOR DETERMINING THE END OF ATTACK OF AN ENGRAVED SURFACE - Google Patents

METHOD AND APPARATUS FOR DETERMINING THE END OF ATTACK OF AN ENGRAVED SURFACE

Info

Publication number
FR2598508B1
FR2598508B1 FR8607103A FR8607103A FR2598508B1 FR 2598508 B1 FR2598508 B1 FR 2598508B1 FR 8607103 A FR8607103 A FR 8607103A FR 8607103 A FR8607103 A FR 8607103A FR 2598508 B1 FR2598508 B1 FR 2598508B1
Authority
FR
France
Prior art keywords
attack
determining
engraved surface
engraved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8607103A
Other languages
French (fr)
Other versions
FR2598508A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8607103A priority Critical patent/FR2598508B1/en
Publication of FR2598508A1 publication Critical patent/FR2598508A1/en
Application granted granted Critical
Publication of FR2598508B1 publication Critical patent/FR2598508B1/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4788—Diffraction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing
    • G01N2201/122—Kinetic analysis; determining reaction rate
    • G01N2201/1222—Endpoint determination; reaction time determination
FR8607103A 1986-05-09 1986-05-09 METHOD AND APPARATUS FOR DETERMINING THE END OF ATTACK OF AN ENGRAVED SURFACE Expired FR2598508B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8607103A FR2598508B1 (en) 1986-05-09 1986-05-09 METHOD AND APPARATUS FOR DETERMINING THE END OF ATTACK OF AN ENGRAVED SURFACE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8607103A FR2598508B1 (en) 1986-05-09 1986-05-09 METHOD AND APPARATUS FOR DETERMINING THE END OF ATTACK OF AN ENGRAVED SURFACE

Publications (2)

Publication Number Publication Date
FR2598508A1 FR2598508A1 (en) 1987-11-13
FR2598508B1 true FR2598508B1 (en) 1989-05-12

Family

ID=9335344

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8607103A Expired FR2598508B1 (en) 1986-05-09 1986-05-09 METHOD AND APPARATUS FOR DETERMINING THE END OF ATTACK OF AN ENGRAVED SURFACE

Country Status (1)

Country Link
FR (1) FR2598508B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5357304A (en) * 1992-03-25 1994-10-18 Sony Corporation Image development apparatus and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4136940A (en) * 1977-12-19 1979-01-30 Rca Corporation Resist development control system
JPS6079728A (en) * 1983-10-06 1985-05-07 Dainippon Screen Mfg Co Ltd Process of surface treatment
JPS60192338A (en) * 1984-03-13 1985-09-30 Dainichi Nippon Cables Ltd Endpoint detecting method

Also Published As

Publication number Publication date
FR2598508A1 (en) 1987-11-13

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse