FR2589839B1 - Dispositif pour assurer le transfert d'un objet vers un poste de traitement sous atmosphere controlee - Google Patents

Dispositif pour assurer le transfert d'un objet vers un poste de traitement sous atmosphere controlee

Info

Publication number
FR2589839B1
FR2589839B1 FR8516876A FR8516876A FR2589839B1 FR 2589839 B1 FR2589839 B1 FR 2589839B1 FR 8516876 A FR8516876 A FR 8516876A FR 8516876 A FR8516876 A FR 8516876A FR 2589839 B1 FR2589839 B1 FR 2589839B1
Authority
FR
France
Prior art keywords
transfer
providing
controlled atmosphere
treatment station
station under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8516876A
Other languages
English (en)
Other versions
FR2589839A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8516876A priority Critical patent/FR2589839B1/fr
Publication of FR2589839A1 publication Critical patent/FR2589839A1/fr
Application granted granted Critical
Publication of FR2589839B1 publication Critical patent/FR2589839B1/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Organic Chemistry (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
FR8516876A 1985-11-12 1985-11-12 Dispositif pour assurer le transfert d'un objet vers un poste de traitement sous atmosphere controlee Expired FR2589839B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8516876A FR2589839B1 (fr) 1985-11-12 1985-11-12 Dispositif pour assurer le transfert d'un objet vers un poste de traitement sous atmosphere controlee

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8516876A FR2589839B1 (fr) 1985-11-12 1985-11-12 Dispositif pour assurer le transfert d'un objet vers un poste de traitement sous atmosphere controlee

Publications (2)

Publication Number Publication Date
FR2589839A1 FR2589839A1 (fr) 1987-05-15
FR2589839B1 true FR2589839B1 (fr) 1988-01-15

Family

ID=9324827

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8516876A Expired FR2589839B1 (fr) 1985-11-12 1985-11-12 Dispositif pour assurer le transfert d'un objet vers un poste de traitement sous atmosphere controlee

Country Status (1)

Country Link
FR (1) FR2589839B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5909994A (en) * 1996-11-18 1999-06-08 Applied Materials, Inc. Vertical dual loadlock chamber
US6152070A (en) 1996-11-18 2000-11-28 Applied Materials, Inc. Tandem process chamber

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1430367A (en) * 1972-08-04 1976-03-31 Secr Defence Vacuum chamber
US3907389A (en) * 1973-12-12 1975-09-23 Marion E Cox Glove box chamber
US4162196A (en) * 1976-11-24 1979-07-24 National Appliance Company Adaptor collar
AT381871B (de) * 1981-11-26 1986-12-10 Voest Alpine Ag Einrichtung zum verschliessen einer beschickungsoeffnung fuer autoklaven

Also Published As

Publication number Publication date
FR2589839A1 (fr) 1987-05-15

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Legal Events

Date Code Title Description
CL Concession to grant licences
ST Notification of lapse