FR2584392B1 - Traitement de couches minces d'oxyde metallique ou de metal en vue de modifier leurs caracteristiques - Google Patents

Traitement de couches minces d'oxyde metallique ou de metal en vue de modifier leurs caracteristiques

Info

Publication number
FR2584392B1
FR2584392B1 FR8510145A FR8510145A FR2584392B1 FR 2584392 B1 FR2584392 B1 FR 2584392B1 FR 8510145 A FR8510145 A FR 8510145A FR 8510145 A FR8510145 A FR 8510145A FR 2584392 B1 FR2584392 B1 FR 2584392B1
Authority
FR
France
Prior art keywords
metal
modifying
treatment
view
thin films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8510145A
Other languages
English (en)
Other versions
FR2584392A1 (fr
Inventor
Vincent Sauvinet
Maurice Trouve
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Vitrage SA
Original Assignee
Saint Gobain Vitrage SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR8510145A priority Critical patent/FR2584392B1/fr
Application filed by Saint Gobain Vitrage SA filed Critical Saint Gobain Vitrage SA
Priority to AT85402606T priority patent/ATE66907T1/de
Priority to EP90201811A priority patent/EP0397292B1/fr
Priority to DE90201811T priority patent/DE3587294T2/de
Priority to EP85402606A priority patent/EP0192009B1/fr
Priority to DE8585402606T priority patent/DE3584012D1/de
Priority to AT90201811T priority patent/ATE88449T1/de
Priority to ES551004A priority patent/ES8702315A1/es
Priority to US06/821,365 priority patent/US4859499A/en
Priority to JP61016533A priority patent/JP2568175B2/ja
Publication of FR2584392A1 publication Critical patent/FR2584392A1/fr
Priority to US07/363,758 priority patent/US5851642A/en
Application granted granted Critical
Publication of FR2584392B1 publication Critical patent/FR2584392B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884Manufacture of transparent electrodes, e.g. TCO, ITO
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/25Oxides by deposition from the liquid phase
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C51/00Preparation of carboxylic acids or their salts, halides or anhydrides
    • C07C51/41Preparation of salts of carboxylic acids
    • C07C51/412Preparation of salts of carboxylic acids by conversion of the acids, their salts, esters or anhydrides with the same carboxylic acid part
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C53/00Saturated compounds having only one carboxyl group bound to an acyclic carbon atom or hydrogen
    • C07C53/02Formic acid
    • C07C53/06Salts thereof
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/215In2O3
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/23Mixtures
    • C03C2217/231In2O3/SnO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/11Deposition methods from solutions or suspensions
    • C03C2218/112Deposition methods from solutions or suspensions by spraying
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/17Deposition methods from a solid phase
FR8510145A 1985-01-22 1985-07-03 Traitement de couches minces d'oxyde metallique ou de metal en vue de modifier leurs caracteristiques Expired - Fee Related FR2584392B1 (fr)

Priority Applications (11)

Application Number Priority Date Filing Date Title
FR8510145A FR2584392B1 (fr) 1985-07-03 1985-07-03 Traitement de couches minces d'oxyde metallique ou de metal en vue de modifier leurs caracteristiques
EP90201811A EP0397292B1 (fr) 1985-01-22 1985-12-23 Procédé pour la formation d'une couche mince d'oxydes métalliques sur un substrat, notamment en verre, et son utilisation comme vitrage
DE90201811T DE3587294T2 (de) 1985-01-22 1985-12-23 Verfahren zur Herstellung einer dünnen Metalloxidbeschichtung auf einem Substrat, insbesondere Glas und deren Verwendung als Verglasung.
EP85402606A EP0192009B1 (fr) 1985-01-22 1985-12-23 Procédé de prèparation d'un poudre à base de formiate d'indium pour la formation d'une couche mince sur un substrat, notamment en verre.
DE8585402606T DE3584012D1 (de) 1985-01-22 1985-12-23 Verfahren zur herstellung eines pulvers auf basis von indium-formiat zur herstellung einer duennen beschichtung auf einem substrat, insbesondere auf glas.
AT90201811T ATE88449T1 (de) 1985-01-22 1985-12-23 Verfahren zur herstellung einer duennen metalloxidbeschichtung auf einem substrat, insbesondere glas und deren verwendung als verglasung.
AT85402606T ATE66907T1 (de) 1985-01-22 1985-12-23 Verfahren zur herstellung eines pulvers auf basis von indium-formiat zur herstellung einer duennen beschichtung auf einem substrat, insbesondere auf glas.
ES551004A ES8702315A1 (es) 1985-01-22 1986-01-17 Procedimiento de preparacion de un polvo a base de formiato indio para la formacion de una capa fina sobre un sustrato,particularmente de vidrio
US06/821,365 US4859499A (en) 1985-01-22 1986-01-22 Method for coating a substrate with an electrically conductive layer
JP61016533A JP2568175B2 (ja) 1985-07-03 1986-01-28 金属酸化物薄層を被覆したガラス板の製造方法
US07/363,758 US5851642A (en) 1985-01-22 1989-07-10 Product produced by coating a substrate with an electrically conductive layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8510145A FR2584392B1 (fr) 1985-07-03 1985-07-03 Traitement de couches minces d'oxyde metallique ou de metal en vue de modifier leurs caracteristiques

Publications (2)

Publication Number Publication Date
FR2584392A1 FR2584392A1 (fr) 1987-01-09
FR2584392B1 true FR2584392B1 (fr) 1992-02-14

Family

ID=9320920

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8510145A Expired - Fee Related FR2584392B1 (fr) 1985-01-22 1985-07-03 Traitement de couches minces d'oxyde metallique ou de metal en vue de modifier leurs caracteristiques

Country Status (2)

Country Link
JP (1) JP2568175B2 (fr)
FR (1) FR2584392B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634753B1 (fr) * 1988-07-27 1992-08-21 Saint Gobain Vitrage Vitrage a couche electro-conductrice obtenue par pyrolyse de composes en poudre, utilisable en tant que pare-brise pour automobile
FR2695117B1 (fr) * 1992-08-28 1994-12-02 Saint Gobain Vitrage Int Procédé de traitement de couches minces à propriétés de conduction électrique et/ou de réflexion dans l'infra-rouge.
FR2911130B1 (fr) * 2007-01-05 2009-11-27 Saint Gobain Procede de depot de couche mince et produit obtenu
FR2943050A1 (fr) * 2009-03-11 2010-09-17 Saint Gobain Procede de depot de couche mince.
JP7162297B2 (ja) * 2018-08-08 2022-10-28 キレスト株式会社 カーボン基材上に金属酸化物が固定化された複合体の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694337A (en) * 1971-01-04 1972-09-26 Nippon Sheet Glass Co Ltd Sputtering method for manufacturing transparent,heat ray reflecting glass
DE2441862B2 (de) * 1974-08-31 1979-06-28 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung einer transparenten, wärmereflektierenden Schicht aus dotiertem Indiumoxid auf Flachglas
JPS57130303A (en) * 1981-02-03 1982-08-12 Sharp Kk Method of producing transparent conductive film
JPS5820754A (ja) * 1981-07-28 1983-02-07 Nippon Soda Co Ltd 導電性被膜の成膜法
GB2119360B (en) * 1982-04-30 1986-03-26 Glaverbel Coating vitreous substrates
US4490227A (en) * 1982-11-03 1984-12-25 Donnelly Mirrors, Inc. Process for making a curved, conductively coated glass member and the product thereof

Also Published As

Publication number Publication date
FR2584392A1 (fr) 1987-01-09
JP2568175B2 (ja) 1996-12-25
JPS627844A (ja) 1987-01-14

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Legal Events

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