FR2577675B1 - Instrument pour mesurer la fluorescence produite dans un echantillon excite par des rayons x - Google Patents

Instrument pour mesurer la fluorescence produite dans un echantillon excite par des rayons x

Info

Publication number
FR2577675B1
FR2577675B1 FR868602256A FR8602256A FR2577675B1 FR 2577675 B1 FR2577675 B1 FR 2577675B1 FR 868602256 A FR868602256 A FR 868602256A FR 8602256 A FR8602256 A FR 8602256A FR 2577675 B1 FR2577675 B1 FR 2577675B1
Authority
FR
France
Prior art keywords
rays
instrument
measuring
fluorescence produced
sample excited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR868602256A
Other languages
English (en)
Other versions
FR2577675A1 (fr
Inventor
Koichiro Oba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of FR2577675A1 publication Critical patent/FR2577675A1/fr
Application granted granted Critical
Publication of FR2577675B1 publication Critical patent/FR2577675B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
FR868602256A 1985-02-19 1986-02-19 Instrument pour mesurer la fluorescence produite dans un echantillon excite par des rayons x Expired - Fee Related FR2577675B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60031076A JPS61189448A (ja) 1985-02-19 1985-02-19 Ｘ線により励起された螢光を測定する装置

Publications (2)

Publication Number Publication Date
FR2577675A1 FR2577675A1 (fr) 1986-08-22
FR2577675B1 true FR2577675B1 (fr) 1990-05-04

Family

ID=12321340

Family Applications (1)

Application Number Title Priority Date Filing Date
FR868602256A Expired - Fee Related FR2577675B1 (fr) 1985-02-19 1986-02-19 Instrument pour mesurer la fluorescence produite dans un echantillon excite par des rayons x

Country Status (4)

Country Link
US (1) US4724536A (fr)
JP (1) JPS61189448A (fr)
DE (1) DE3604836A1 (fr)
FR (1) FR2577675B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5042058A (en) * 1989-03-22 1991-08-20 University Of California Ultrashort time-resolved x-ray source
US5930331A (en) * 1989-03-22 1999-07-27 Rentzepis; Peter M. Compact high-intensity pulsed x-ray source, particularly for lithography
US6349128B1 (en) * 2000-04-27 2002-02-19 Philips Electronics North America Corporation Method and device using x-rays to measure thickness and composition of thin films

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE213512C (fr) *
US3991309A (en) * 1975-07-09 1976-11-09 University Of Rochester Methods and apparatus for the control and analysis of X-rays
US4435828A (en) * 1982-04-14 1984-03-06 Battelle Development Corporation Fluorescence laser EXAFS

Also Published As

Publication number Publication date
JPS61189448A (ja) 1986-08-23
DE3604836C2 (fr) 1989-12-21
US4724536A (en) 1988-02-09
FR2577675A1 (fr) 1986-08-22
DE3604836A1 (de) 1986-08-21

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Legal Events

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ST Notification of lapse