FR2573219B1 - TRANSPARENT FILM IN THE ULTRAVIOLET FOR THE PROTECTION OF PHOTOLITHOGRAPHIC COVERS - Google Patents

TRANSPARENT FILM IN THE ULTRAVIOLET FOR THE PROTECTION OF PHOTOLITHOGRAPHIC COVERS

Info

Publication number
FR2573219B1
FR2573219B1 FR858514692A FR8514692A FR2573219B1 FR 2573219 B1 FR2573219 B1 FR 2573219B1 FR 858514692 A FR858514692 A FR 858514692A FR 8514692 A FR8514692 A FR 8514692A FR 2573219 B1 FR2573219 B1 FR 2573219B1
Authority
FR
France
Prior art keywords
photolithographic
ultraviolet
covers
protection
transparent film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR858514692A
Other languages
French (fr)
Other versions
FR2573219A1 (en
Inventor
Joseph Gordon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Photomasks Inc
Original Assignee
Du Pont Semiconductor Products Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont Semiconductor Products Inc filed Critical Du Pont Semiconductor Products Inc
Publication of FR2573219A1 publication Critical patent/FR2573219A1/en
Application granted granted Critical
Publication of FR2573219B1 publication Critical patent/FR2573219B1/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
    • B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
    • B29C41/12—Spreading-out the material on a substrate, e.g. on the surface of a liquid
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2001/00—Use of cellulose, modified cellulose or cellulose derivatives, e.g. viscose, as moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2001/00—Use of cellulose, modified cellulose or cellulose derivatives, e.g. viscose, as moulding material
    • B29K2001/08—Cellulose derivatives
    • B29K2001/12—Cellulose acetate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/0058—Liquid or visquous
    • B29K2105/0073—Solution
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2301/00—Characterised by the use of cellulose, modified cellulose or cellulose derivatives
    • C08J2301/08—Cellulose derivatives
    • C08J2301/14—Mixed esters

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
FR858514692A 1984-10-16 1985-10-03 TRANSPARENT FILM IN THE ULTRAVIOLET FOR THE PROTECTION OF PHOTOLITHOGRAPHIC COVERS Expired FR2573219B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66157784A 1984-10-16 1984-10-16

Publications (2)

Publication Number Publication Date
FR2573219A1 FR2573219A1 (en) 1986-05-16
FR2573219B1 true FR2573219B1 (en) 1989-02-03

Family

ID=24654183

Family Applications (1)

Application Number Title Priority Date Filing Date
FR858514692A Expired FR2573219B1 (en) 1984-10-16 1985-10-03 TRANSPARENT FILM IN THE ULTRAVIOLET FOR THE PROTECTION OF PHOTOLITHOGRAPHIC COVERS

Country Status (5)

Country Link
JP (1) JPH065383B2 (en)
DE (1) DE3536708A1 (en)
FR (1) FR2573219B1 (en)
GB (1) GB2165545B (en)
IT (1) IT1187747B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1330860C (en) * 1987-10-26 1994-07-26 Muneyuki Matsumoto Dust-proof film
JP5950467B2 (en) * 2013-09-24 2016-07-13 信越化学工業株式会社 Pellicle

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB716398A (en) * 1952-07-07 1954-10-06 Rose Rand Improvements in or relating to purses or handbags
US3549248A (en) * 1967-12-15 1970-12-22 Polaroid Corp Optical devices comprising cellulose acetate and cellulose acetate butyrate
US4453828A (en) * 1981-12-02 1984-06-12 Advanced Semiconductor Products, Inc. Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes
JPS58219023A (en) * 1982-06-15 1983-12-20 Daicel Chem Ind Ltd Manufacture of resin membrane
US4482591A (en) * 1983-03-08 1984-11-13 J. T. Baker Chemical Company Polyvinyl butyrate pellicle compositions and pellicles thereof for projection printing

Also Published As

Publication number Publication date
GB8523609D0 (en) 1985-10-30
IT8522329A0 (en) 1985-10-02
GB2165545A (en) 1986-04-16
DE3536708A1 (en) 1986-04-17
FR2573219A1 (en) 1986-05-16
JPH065383B2 (en) 1994-01-19
GB2165545B (en) 1988-03-30
IT1187747B (en) 1987-12-23
JPS61106243A (en) 1986-05-24

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Legal Events

Date Code Title Description
TP Transmission of property
CA Change of address
CD Change of name or company name
TP Transmission of property
ST Notification of lapse