FR2573218B1 - Appareil electrique de detection et caracterisation de couches faiblement conductrices posees ou deposees sur un substrat conducteur de l'electricite - Google Patents

Appareil electrique de detection et caracterisation de couches faiblement conductrices posees ou deposees sur un substrat conducteur de l'electricite

Info

Publication number
FR2573218B1
FR2573218B1 FR8417082A FR8417082A FR2573218B1 FR 2573218 B1 FR2573218 B1 FR 2573218B1 FR 8417082 A FR8417082 A FR 8417082A FR 8417082 A FR8417082 A FR 8417082A FR 2573218 B1 FR2573218 B1 FR 2573218B1
Authority
FR
France
Prior art keywords
deposited
electrical detection
electrically conductive
characterization apparatus
layers laid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8417082A
Other languages
English (en)
Other versions
FR2573218A1 (fr
Inventor
Robert Haug
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR8417082A priority Critical patent/FR2573218B1/fr
Publication of FR2573218A1 publication Critical patent/FR2573218A1/fr
Application granted granted Critical
Publication of FR2573218B1 publication Critical patent/FR2573218B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
FR8417082A 1984-11-09 1984-11-09 Appareil electrique de detection et caracterisation de couches faiblement conductrices posees ou deposees sur un substrat conducteur de l'electricite Expired FR2573218B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8417082A FR2573218B1 (fr) 1984-11-09 1984-11-09 Appareil electrique de detection et caracterisation de couches faiblement conductrices posees ou deposees sur un substrat conducteur de l'electricite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8417082A FR2573218B1 (fr) 1984-11-09 1984-11-09 Appareil electrique de detection et caracterisation de couches faiblement conductrices posees ou deposees sur un substrat conducteur de l'electricite

Publications (2)

Publication Number Publication Date
FR2573218A1 FR2573218A1 (fr) 1986-05-16
FR2573218B1 true FR2573218B1 (fr) 1987-01-02

Family

ID=9309422

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8417082A Expired FR2573218B1 (fr) 1984-11-09 1984-11-09 Appareil electrique de detection et caracterisation de couches faiblement conductrices posees ou deposees sur un substrat conducteur de l'electricite

Country Status (1)

Country Link
FR (1) FR2573218B1 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1033445B (de) * 1953-08-10 1958-07-03 Dr Hellmuth Hertz Verfahren und Einrichtung zum Pruefen von isolierenden Schichten auf Poren und Risse
FR2136999B1 (fr) * 1971-05-11 1973-05-11 Radiotechnique Compelec

Also Published As

Publication number Publication date
FR2573218A1 (fr) 1986-05-16

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