FR2569000B1 - Procede et appareils pour le controle in situ de l'epaisseur de couches ultraminces deposees par pulverisation ionique - Google Patents
Procede et appareils pour le controle in situ de l'epaisseur de couches ultraminces deposees par pulverisation ioniqueInfo
- Publication number
- FR2569000B1 FR2569000B1 FR8412697A FR8412697A FR2569000B1 FR 2569000 B1 FR2569000 B1 FR 2569000B1 FR 8412697 A FR8412697 A FR 8412697A FR 8412697 A FR8412697 A FR 8412697A FR 2569000 B1 FR2569000 B1 FR 2569000B1
- Authority
- FR
- France
- Prior art keywords
- ultramined
- thickness
- situ control
- ion spraying
- layers layered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8412697A FR2569000B1 (fr) | 1984-08-10 | 1984-08-10 | Procede et appareils pour le controle in situ de l'epaisseur de couches ultraminces deposees par pulverisation ionique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8412697A FR2569000B1 (fr) | 1984-08-10 | 1984-08-10 | Procede et appareils pour le controle in situ de l'epaisseur de couches ultraminces deposees par pulverisation ionique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2569000A1 FR2569000A1 (fr) | 1986-02-14 |
FR2569000B1 true FR2569000B1 (fr) | 1989-01-27 |
Family
ID=9306981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8412697A Expired FR2569000B1 (fr) | 1984-08-10 | 1984-08-10 | Procede et appareils pour le controle in situ de l'epaisseur de couches ultraminces deposees par pulverisation ionique |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2569000B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001040538A1 (fr) * | 1999-12-03 | 2001-06-07 | The Regents Of The University Of California | Procede et systeme lies au controle de l'epaisseur d'un film depose par evaporation sous vide |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3400066A (en) * | 1965-11-15 | 1968-09-03 | Ibm | Sputtering processes for depositing thin films of controlled thickness |
FR95311E (fr) * | 1967-03-24 | 1970-08-21 | Varian Associates | Appareil de pulvérisation cathodique pour déposer des pellicules minces sur des surfaces a revetir. |
US3654109A (en) * | 1968-04-25 | 1972-04-04 | Ibm | Apparatus and method for measuring rate in flow processes |
US4166783A (en) * | 1978-04-17 | 1979-09-04 | Varian Associates, Inc. | Deposition rate regulation by computer control of sputtering systems |
DE3378508D1 (en) * | 1982-09-10 | 1988-12-22 | Nippon Telegraph & Telephone | Plasma deposition method and apparatus |
-
1984
- 1984-08-10 FR FR8412697A patent/FR2569000B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2569000A1 (fr) | 1986-02-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ER | Errata listed in the french official journal (bopi) |
Free format text: 07/86 |
|
ST | Notification of lapse |