FR2563023B1 - Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement - Google Patents

Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement

Info

Publication number
FR2563023B1
FR2563023B1 FR8406063A FR8406063A FR2563023B1 FR 2563023 B1 FR2563023 B1 FR 2563023B1 FR 8406063 A FR8406063 A FR 8406063A FR 8406063 A FR8406063 A FR 8406063A FR 2563023 B1 FR2563023 B1 FR 2563023B1
Authority
FR
France
Prior art keywords
regulating
composition
pressure
gaseous medium
medium contained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8406063A
Other languages
English (en)
Other versions
FR2563023A1 (fr
Inventor
Jean-Francois Collombet
Jourdain Kazandjoglou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8406063A priority Critical patent/FR2563023B1/fr
Publication of FR2563023A1 publication Critical patent/FR2563023A1/fr
Application granted granted Critical
Publication of FR2563023B1 publication Critical patent/FR2563023B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2006Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • G05D16/2046Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
    • G05D16/2053Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures the plurality of throttling means comprising only a first throttling means acting on a higher pressure and a second throttling means acting on a lower pressure, e.g. the atmosphere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00Enclosures; Chambers
    • B01L1/02Air-pressure chambers; Air-locks therefor
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2006Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • G05D16/2046Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D22/00Control of humidity

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Measurement Of Radiation (AREA)
FR8406063A 1984-04-17 1984-04-17 Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement Expired FR2563023B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8406063A FR2563023B1 (fr) 1984-04-17 1984-04-17 Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8406063A FR2563023B1 (fr) 1984-04-17 1984-04-17 Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement

Publications (2)

Publication Number Publication Date
FR2563023A1 FR2563023A1 (fr) 1985-10-18
FR2563023B1 true FR2563023B1 (fr) 1986-06-06

Family

ID=9303232

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8406063A Expired FR2563023B1 (fr) 1984-04-17 1984-04-17 Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement

Country Status (1)

Country Link
FR (1) FR2563023B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2000188A1 (fr) * 1989-06-29 1990-12-19 David C. Thoman Doseur regulateur de pression pour chambre de commande de banc d'essai
CN109837528A (zh) * 2019-04-19 2019-06-04 北京工业大学 一种手套箱结合原子层沉积的镀膜设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1346410A (fr) * 1962-11-07 1963-12-20 Commissariat Energie Atomique Procédé de stabilisation de la pression et dispositif en faisant application
DE2655855C3 (de) * 1976-12-09 1985-08-22 Alkem Gmbh, 6450 Hanau Automatische Innendruckregelung von gasdichten Räumen
GB1552009A (en) * 1977-08-09 1979-09-05 Buglass D B Control of ventilation air
US4362922A (en) * 1980-11-26 1982-12-07 Standex International Corporation Air make-up unit

Also Published As

Publication number Publication date
FR2563023A1 (fr) 1985-10-18

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Legal Events

Date Code Title Description
ST Notification of lapse