FR2563023B1 - Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement - Google Patents
Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinementInfo
- Publication number
- FR2563023B1 FR2563023B1 FR8406063A FR8406063A FR2563023B1 FR 2563023 B1 FR2563023 B1 FR 2563023B1 FR 8406063 A FR8406063 A FR 8406063A FR 8406063 A FR8406063 A FR 8406063A FR 2563023 B1 FR2563023 B1 FR 2563023B1
- Authority
- FR
- France
- Prior art keywords
- regulating
- composition
- pressure
- gaseous medium
- medium contained
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
- G05D16/2046—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
- G05D16/2053—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures the plurality of throttling means comprising only a first throttling means acting on a higher pressure and a second throttling means acting on a lower pressure, e.g. the atmosphere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L1/00—Enclosures; Chambers
- B01L1/02—Air-pressure chambers; Air-locks therefor
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
- G05D16/2046—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a single pressure from a plurality of converging pressures
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D22/00—Control of humidity
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Measurement Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8406063A FR2563023B1 (fr) | 1984-04-17 | 1984-04-17 | Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8406063A FR2563023B1 (fr) | 1984-04-17 | 1984-04-17 | Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2563023A1 FR2563023A1 (fr) | 1985-10-18 |
FR2563023B1 true FR2563023B1 (fr) | 1986-06-06 |
Family
ID=9303232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8406063A Expired FR2563023B1 (fr) | 1984-04-17 | 1984-04-17 | Systeme de regulation de la pression et de la composition d'un milieu gazeux contenu dans une enceinte de confinement |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2563023B1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2000188A1 (fr) * | 1989-06-29 | 1990-12-19 | David C. Thoman | Doseur regulateur de pression pour chambre de commande de banc d'essai |
CN109837528A (zh) * | 2019-04-19 | 2019-06-04 | 北京工业大学 | 一种手套箱结合原子层沉积的镀膜设备 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1346410A (fr) * | 1962-11-07 | 1963-12-20 | Commissariat Energie Atomique | Procédé de stabilisation de la pression et dispositif en faisant application |
DE2655855C3 (de) * | 1976-12-09 | 1985-08-22 | Alkem Gmbh, 6450 Hanau | Automatische Innendruckregelung von gasdichten Räumen |
GB1552009A (en) * | 1977-08-09 | 1979-09-05 | Buglass D B | Control of ventilation air |
US4362922A (en) * | 1980-11-26 | 1982-12-07 | Standex International Corporation | Air make-up unit |
-
1984
- 1984-04-17 FR FR8406063A patent/FR2563023B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2563023A1 (fr) | 1985-10-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |