FR2549229B1 - Appareil de mesure des impuretes dans l'eau ultrapure - Google Patents

Appareil de mesure des impuretes dans l'eau ultrapure

Info

Publication number
FR2549229B1
FR2549229B1 FR8402942A FR8402942A FR2549229B1 FR 2549229 B1 FR2549229 B1 FR 2549229B1 FR 8402942 A FR8402942 A FR 8402942A FR 8402942 A FR8402942 A FR 8402942A FR 2549229 B1 FR2549229 B1 FR 2549229B1
Authority
FR
France
Prior art keywords
ultrapure water
measuring impurities
impurities
measuring
ultrapure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8402942A
Other languages
English (en)
Other versions
FR2549229A1 (fr
Inventor
Kozo Shirato
Kazuyasu Kawashima
Yoshihiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Erma Optical Works Ltd
Original Assignee
Erma Optical Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Erma Optical Works Ltd filed Critical Erma Optical Works Ltd
Publication of FR2549229A1 publication Critical patent/FR2549229A1/fr
Application granted granted Critical
Publication of FR2549229B1 publication Critical patent/FR2549229B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/12—Coulter-counters
    • G01N15/131—
FR8402942A 1983-06-28 1984-02-27 Appareil de mesure des impuretes dans l'eau ultrapure Expired FR2549229B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58117841A JPS608734A (ja) 1983-06-28 1983-06-28 超純水中の不純物の測定装置

Publications (2)

Publication Number Publication Date
FR2549229A1 FR2549229A1 (fr) 1985-01-18
FR2549229B1 true FR2549229B1 (fr) 1989-06-02

Family

ID=14721586

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8402942A Expired FR2549229B1 (fr) 1983-06-28 1984-02-27 Appareil de mesure des impuretes dans l'eau ultrapure

Country Status (6)

Country Link
US (1) US4651087A (fr)
JP (1) JPS608734A (fr)
CA (1) CA1218870A (fr)
DE (1) DE3407442A1 (fr)
FR (1) FR2549229B1 (fr)
GB (1) GB2142434B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6271831A (ja) * 1985-09-25 1987-04-02 Hitachi Ltd 液中の不純物の測定方法とその装置
JPH0814529B2 (ja) * 1986-02-17 1996-02-14 株式会社日立製作所 液中異物の計測システム
JPH0663961B2 (ja) * 1986-03-24 1994-08-22 日本科学工業株式会社 液中不純物測定方法とその測定装置
US4833622A (en) * 1986-11-03 1989-05-23 Combustion Engineering, Inc. Intelligent chemistry management system
US4972137A (en) * 1989-05-31 1990-11-20 Coulter Electronics, Inc. Isolation circuit for blood cell counter
US5183486A (en) * 1990-12-04 1993-02-02 Spectra-Physics, Inc. Apparatus for degassing a liquid
US5945831A (en) * 1997-06-10 1999-08-31 Sargent; John S. Volume charge density measuring system
JP4629901B2 (ja) * 2001-04-26 2011-02-09 株式会社四国総合研究所 油中微粉計量装置用脱泡前処理装置
US20160192880A9 (en) * 2004-05-28 2016-07-07 David Scott Utley Intra-Oral Detector and System for Modification of Undesired Behaviors and Methods Thereof
JP5231028B2 (ja) * 2008-01-21 2013-07-10 東京エレクトロン株式会社 塗布液供給装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3921006A (en) * 1974-09-16 1975-11-18 Coulter Electronics Particle counting apparatus including isolated manometer
GB2014870B (en) * 1978-02-24 1982-09-02 Du Pont Degasser
JPS551816A (en) * 1978-06-15 1980-01-09 Mitsubishi Rayon Co Ltd Vapor-liquid contactor
US4361803A (en) * 1980-08-26 1982-11-30 Coulter Electronics, Inc. Apparatus for recirculating sweep flow electrolyte without a pump
US4434647A (en) * 1981-07-27 1984-03-06 Lockheed Corporation Dynamic spot calibration for automatic particle counters

Also Published As

Publication number Publication date
FR2549229A1 (fr) 1985-01-18
US4651087A (en) 1987-03-17
GB2142434A (en) 1985-01-16
CA1218870A (fr) 1987-03-10
GB2142434B (en) 1987-07-15
JPS608734A (ja) 1985-01-17
JPH0237979B2 (fr) 1990-08-28
GB8405041D0 (en) 1984-04-04
DE3407442A1 (de) 1985-01-03

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Legal Events

Date Code Title Description
ST Notification of lapse