FR2536872A1 - Generateur de motifs pour circuits integres et procede de generation de motifs utilisant ce generateur - Google Patents
Generateur de motifs pour circuits integres et procede de generation de motifs utilisant ce generateur Download PDFInfo
- Publication number
- FR2536872A1 FR2536872A1 FR8219997A FR8219997A FR2536872A1 FR 2536872 A1 FR2536872 A1 FR 2536872A1 FR 8219997 A FR8219997 A FR 8219997A FR 8219997 A FR8219997 A FR 8219997A FR 2536872 A1 FR2536872 A1 FR 2536872A1
- Authority
- FR
- France
- Prior art keywords
- sep
- uot
- enb
- ans
- autre
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010354 integration Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 description 20
- 235000015107 ale Nutrition 0.000 description 5
- 241000272522 Anas Species 0.000 description 4
- 101100386054 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) CYS3 gene Proteins 0.000 description 2
- 239000008186 active pharmaceutical agent Substances 0.000 description 2
- 101150035983 str1 gene Proteins 0.000 description 2
- LSTPKMWNRWCNLS-UHFFFAOYSA-N 1-amino-2,3-dihydroindene-1,5-dicarboxylic acid Chemical compound OC(=O)C1=CC=C2C(N)(C(O)=O)CCC2=C1 LSTPKMWNRWCNLS-UHFFFAOYSA-N 0.000 description 1
- 101150072844 APOM gene Proteins 0.000 description 1
- 241000272814 Anser sp. Species 0.000 description 1
- 102100037324 Apolipoprotein M Human genes 0.000 description 1
- 101100491152 Caenorhabditis elegans lem-4 gene Proteins 0.000 description 1
- AHCYMLUZIRLXAA-SHYZEUOFSA-N Deoxyuridine 5'-triphosphate Chemical compound O1[C@H](COP(O)(=O)OP(O)(=O)OP(O)(O)=O)[C@@H](O)C[C@@H]1N1C(=O)NC(=O)C=C1 AHCYMLUZIRLXAA-SHYZEUOFSA-N 0.000 description 1
- 241001362576 Eana Species 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 101000713575 Homo sapiens Tubulin beta-3 chain Proteins 0.000 description 1
- 101000939500 Homo sapiens UBX domain-containing protein 11 Proteins 0.000 description 1
- 241000257303 Hymenoptera Species 0.000 description 1
- 241000282858 Hyracoidea Species 0.000 description 1
- 241000283162 Inia geoffrensis Species 0.000 description 1
- 241000274177 Juniperus sabina Species 0.000 description 1
- 101100247252 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) uvs-2 gene Proteins 0.000 description 1
- 244000004005 Nypa fruticans Species 0.000 description 1
- 235000005305 Nypa fruticans Nutrition 0.000 description 1
- 101000684510 Rattus norvegicus Sentrin-specific protease 2 Proteins 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 102100036790 Tubulin beta-3 chain Human genes 0.000 description 1
- 102100029645 UBX domain-containing protein 11 Human genes 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 108010056690 insulin-related neuropeptide Proteins 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004481 total suppression of sideband Methods 0.000 description 1
- XOOUIPVCVHRTMJ-UHFFFAOYSA-L zinc stearate Chemical compound [Zn+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O XOOUIPVCVHRTMJ-UHFFFAOYSA-L 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Thin Magnetic Films (AREA)
- Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8219997A FR2536872A1 (fr) | 1982-11-29 | 1982-11-29 | Generateur de motifs pour circuits integres et procede de generation de motifs utilisant ce generateur |
| US06/554,804 US4514082A (en) | 1982-11-29 | 1983-11-23 | Pattern generator for integrated circuits and process of generating patterns by means of said generator |
| DE8383402275T DE3365475D1 (en) | 1982-11-29 | 1983-11-25 | Pattern generator for integrated circuits and process using this generator |
| EP83402275A EP0112217B1 (fr) | 1982-11-29 | 1983-11-25 | Générateur de motifs pour circuits intégrés et procédé de génération de motifs utilisant ce générateur |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8219997A FR2536872A1 (fr) | 1982-11-29 | 1982-11-29 | Generateur de motifs pour circuits integres et procede de generation de motifs utilisant ce generateur |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2536872A1 true FR2536872A1 (fr) | 1984-06-01 |
| FR2536872B1 FR2536872B1 (enExample) | 1985-04-12 |
Family
ID=9279626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8219997A Granted FR2536872A1 (fr) | 1982-11-29 | 1982-11-29 | Generateur de motifs pour circuits integres et procede de generation de motifs utilisant ce generateur |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4514082A (enExample) |
| EP (1) | EP0112217B1 (enExample) |
| DE (1) | DE3365475D1 (enExample) |
| FR (1) | FR2536872A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2601465B1 (fr) * | 1986-07-11 | 1988-10-21 | Bull Sa | Dispositif modulateur haute frequence de polarisation de la lumiere |
| KR950002172B1 (ko) * | 1991-06-13 | 1995-03-14 | 금성일렉트론주식회사 | 편광자를 사용한 편광노광장치 및 편광마스크 제조방법 |
| US5442184A (en) * | 1993-12-10 | 1995-08-15 | Texas Instruments Incorporated | System and method for semiconductor processing using polarized radiant energy |
| US6251550B1 (en) * | 1998-07-10 | 2001-06-26 | Ball Semiconductor, Inc. | Maskless photolithography system that digitally shifts mask data responsive to alignment data |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3632205A (en) * | 1969-01-29 | 1972-01-04 | Thomson Csf | Electro-optical image-tracing systems, particularly for use with laser beams |
| EP0063916A1 (en) * | 1981-04-21 | 1982-11-03 | Nippon Telegraph And Telephone Corporation | Semiconductor intregrated circuits and manufacturing process thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3909130A (en) * | 1973-08-24 | 1975-09-30 | Ilya Mikhailovich Glaskov | Microphotocomposing apparatus for making artworks |
| US4110762A (en) * | 1974-05-10 | 1978-08-29 | Commissariat A L'energie Atomique | Drawing machines especially for integrated circuit masks |
| DE2905636C2 (de) * | 1979-02-14 | 1985-06-20 | Censor Patent- Und Versuchs-Anstalt, Vaduz | Verfahren zum Kopieren von Masken auf ein Werkstück |
-
1982
- 1982-11-29 FR FR8219997A patent/FR2536872A1/fr active Granted
-
1983
- 1983-11-23 US US06/554,804 patent/US4514082A/en not_active Expired - Fee Related
- 1983-11-25 DE DE8383402275T patent/DE3365475D1/de not_active Expired
- 1983-11-25 EP EP83402275A patent/EP0112217B1/fr not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3632205A (en) * | 1969-01-29 | 1972-01-04 | Thomson Csf | Electro-optical image-tracing systems, particularly for use with laser beams |
| EP0063916A1 (en) * | 1981-04-21 | 1982-11-03 | Nippon Telegraph And Telephone Corporation | Semiconductor intregrated circuits and manufacturing process thereof |
Non-Patent Citations (1)
| Title |
|---|
| IEEE TRANSACTIONS ON ELECTRON DEVICES, vol. ED-28, no. 11, novembre 1981, IEEE NEW YORK (US) * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3365475D1 (en) | 1986-09-25 |
| EP0112217A1 (fr) | 1984-06-27 |
| US4514082A (en) | 1985-04-30 |
| FR2536872B1 (enExample) | 1985-04-12 |
| EP0112217B1 (fr) | 1986-08-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |