FR2529715B1 - - Google Patents

Info

Publication number
FR2529715B1
FR2529715B1 FR8211571A FR8211571A FR2529715B1 FR 2529715 B1 FR2529715 B1 FR 2529715B1 FR 8211571 A FR8211571 A FR 8211571A FR 8211571 A FR8211571 A FR 8211571A FR 2529715 B1 FR2529715 B1 FR 2529715B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8211571A
Other languages
French (fr)
Other versions
FR2529715A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8211571A priority Critical patent/FR2529715A1/fr
Priority to EP83401331A priority patent/EP0099787A1/fr
Priority to JP58118387A priority patent/JPS5921068A/ja
Publication of FR2529715A1 publication Critical patent/FR2529715A1/fr
Application granted granted Critical
Publication of FR2529715B1 publication Critical patent/FR2529715B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H10P30/21
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H10D30/0227Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate having both lightly-doped source and drain extensions and source and drain regions self-aligned to the sides of the gate, e.g. lightly-doped drain [LDD] MOSFET or double-diffused drain [DDD] MOSFET
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149Source or drain regions of field-effect devices
    • H10D62/151Source or drain regions of field-effect devices of IGFETs 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/351Substrate regions of field-effect devices
    • H10D62/357Substrate regions of field-effect devices of FETs
    • H10D62/364Substrate regions of field-effect devices of FETs of IGFETs
    • H10D62/371Inactive supplementary semiconductor regions, e.g. for preventing punch-through, improving capacity effect or leakage current
    • H10P30/204
FR8211571A 1982-07-01 1982-07-01 Procede d'optimisation du dopage dans un transistor mos Granted FR2529715A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR8211571A FR2529715A1 (fr) 1982-07-01 1982-07-01 Procede d'optimisation du dopage dans un transistor mos
EP83401331A EP0099787A1 (fr) 1982-07-01 1983-06-28 Procédé d'optimisation du dopage dans un transistor MOS
JP58118387A JPS5921068A (ja) 1982-07-01 1983-07-01 Mosトランジスタにおけるド−ピング最適化方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8211571A FR2529715A1 (fr) 1982-07-01 1982-07-01 Procede d'optimisation du dopage dans un transistor mos

Publications (2)

Publication Number Publication Date
FR2529715A1 FR2529715A1 (fr) 1984-01-06
FR2529715B1 true FR2529715B1 (cg-RX-API-DMAC10.html) 1984-12-21

Family

ID=9275586

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8211571A Granted FR2529715A1 (fr) 1982-07-01 1982-07-01 Procede d'optimisation du dopage dans un transistor mos

Country Status (3)

Country Link
EP (1) EP0099787A1 (cg-RX-API-DMAC10.html)
JP (1) JPS5921068A (cg-RX-API-DMAC10.html)
FR (1) FR2529715A1 (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0255882A3 (de) * 1986-08-07 1990-05-30 Siemens Aktiengesellschaft npn-Bipolartransistor mit extrem flachen Emitter/Basis-Strukturen und Verfahren zu seiner Herstellung
US4889819A (en) * 1988-05-20 1989-12-26 International Business Machines Corporation Method for fabricating shallow junctions by preamorphizing with dopant of same conductivity as substrate
EP0359530A3 (en) * 1988-09-15 1991-01-02 Advanced Micro Devices, Inc. Capacitive reduction of junctions in a semiconductor device
DE69027312T2 (de) * 1989-03-02 1997-01-30 Thunderbird Tech Inc Feldeffekttransistor mit fermi-schwellenspannung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1569897A (en) * 1975-12-31 1980-06-25 Ibm Field effect transistor

Also Published As

Publication number Publication date
JPS5921068A (ja) 1984-02-02
FR2529715A1 (fr) 1984-01-06
EP0099787A1 (fr) 1984-02-01

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Legal Events

Date Code Title Description
ST Notification of lapse