FR2527795B1 - Matiere pour photoreserves - Google Patents

Matiere pour photoreserves

Info

Publication number
FR2527795B1
FR2527795B1 FR8309023A FR8309023A FR2527795B1 FR 2527795 B1 FR2527795 B1 FR 2527795B1 FR 8309023 A FR8309023 A FR 8309023A FR 8309023 A FR8309023 A FR 8309023A FR 2527795 B1 FR2527795 B1 FR 2527795B1
Authority
FR
France
Prior art keywords
photoreserves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8309023A
Other languages
English (en)
Other versions
FR2527795A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kureha Corp
Original Assignee
Kureha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9276682A external-priority patent/JPS58209732A/ja
Priority claimed from JP15936482A external-priority patent/JPS5948759A/ja
Application filed by Kureha Corp filed Critical Kureha Corp
Publication of FR2527795A1 publication Critical patent/FR2527795A1/fr
Application granted granted Critical
Publication of FR2527795B1 publication Critical patent/FR2527795B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR8309023A 1982-05-31 1983-05-31 Matiere pour photoreserves Expired FR2527795B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9276682A JPS58209732A (ja) 1982-05-31 1982-05-31 感放射線組成物及びレジスト
JP15936482A JPS5948759A (ja) 1982-09-13 1982-09-13 フオトレジスト材料

Publications (2)

Publication Number Publication Date
FR2527795A1 FR2527795A1 (fr) 1983-12-02
FR2527795B1 true FR2527795B1 (fr) 1985-07-26

Family

ID=26434141

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8309023A Expired FR2527795B1 (fr) 1982-05-31 1983-05-31 Matiere pour photoreserves

Country Status (4)

Country Link
CA (1) CA1202148A (fr)
DE (1) DE3319558C2 (fr)
FR (1) FR2527795B1 (fr)
GB (1) GB2125418B (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005033852A1 (de) * 2005-07-12 2007-01-18 Hach Lange Gmbh Scheibenförmiges Trägersystem mit einer Mehrzahl integrierter Beugungsstrukturen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4262081A (en) * 1979-11-21 1981-04-14 Bell Telephone Laboratories, Incorporated Fabrication based on radiation sensitive resists of halo-alkyl styrene polymers
DE3174780D1 (en) * 1980-11-05 1986-07-10 Nec Corp Radiation-sensitive negative resist

Also Published As

Publication number Publication date
GB8314989D0 (en) 1983-07-06
CA1202148A (fr) 1986-03-18
DE3319558A1 (de) 1983-12-01
DE3319558C2 (de) 1986-10-30
GB2125418B (en) 1985-09-11
GB2125418A (en) 1984-03-07
FR2527795A1 (fr) 1983-12-02

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Legal Events

Date Code Title Description
ST Notification of lapse