FR2526962A1 - Condenseur oeil de mouche a juxtaposition de spheres transparentes pour microphotolithographie - Google Patents

Condenseur oeil de mouche a juxtaposition de spheres transparentes pour microphotolithographie Download PDF

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Publication number
FR2526962A1
FR2526962A1 FR8208359A FR8208359A FR2526962A1 FR 2526962 A1 FR2526962 A1 FR 2526962A1 FR 8208359 A FR8208359 A FR 8208359A FR 8208359 A FR8208359 A FR 8208359A FR 2526962 A1 FR2526962 A1 FR 2526962A1
Authority
FR
France
Prior art keywords
spheres
condenser
layer
layers
condenser according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8208359A
Other languages
English (en)
French (fr)
Other versions
FR2526962B1 (enrdf_load_stackoverflow
Inventor
Michel Letellier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DME
Original Assignee
DME
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DME filed Critical DME
Priority to FR8208359A priority Critical patent/FR2526962A1/fr
Publication of FR2526962A1 publication Critical patent/FR2526962A1/fr
Application granted granted Critical
Publication of FR2526962B1 publication Critical patent/FR2526962B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
FR8208359A 1982-05-13 1982-05-13 Condenseur oeil de mouche a juxtaposition de spheres transparentes pour microphotolithographie Granted FR2526962A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8208359A FR2526962A1 (fr) 1982-05-13 1982-05-13 Condenseur oeil de mouche a juxtaposition de spheres transparentes pour microphotolithographie

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8208359A FR2526962A1 (fr) 1982-05-13 1982-05-13 Condenseur oeil de mouche a juxtaposition de spheres transparentes pour microphotolithographie

Publications (2)

Publication Number Publication Date
FR2526962A1 true FR2526962A1 (fr) 1983-11-18
FR2526962B1 FR2526962B1 (enrdf_load_stackoverflow) 1985-01-25

Family

ID=9274007

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8208359A Granted FR2526962A1 (fr) 1982-05-13 1982-05-13 Condenseur oeil de mouche a juxtaposition de spheres transparentes pour microphotolithographie

Country Status (1)

Country Link
FR (1) FR2526962A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0267599A3 (en) * 1986-07-24 1988-08-17 Dainippon Screen Mfg. Co., Ltd. Fly eye lens unit for illumination
WO1999027406A1 (en) * 1997-11-24 1999-06-03 Svyatoslav Ivanovich Arsenich Optical raster condenser and optical device comprising said raster condenser

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2803163A (en) * 1952-05-20 1957-08-20 Zeiss Ikon Ag Illuminating system for picture projectors
US3302016A (en) * 1964-08-21 1967-01-31 Textron Electronics Inc Optical collimating system
US3493286A (en) * 1965-12-29 1970-02-03 William Garwood Bacon Jr Reflex light reflector
FR2474708A1 (fr) * 1980-01-24 1981-07-31 Dme Procede de microphotolithographie a haute resolution de traits

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2803163A (en) * 1952-05-20 1957-08-20 Zeiss Ikon Ag Illuminating system for picture projectors
US3302016A (en) * 1964-08-21 1967-01-31 Textron Electronics Inc Optical collimating system
US3493286A (en) * 1965-12-29 1970-02-03 William Garwood Bacon Jr Reflex light reflector
FR2474708A1 (fr) * 1980-01-24 1981-07-31 Dme Procede de microphotolithographie a haute resolution de traits

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0267599A3 (en) * 1986-07-24 1988-08-17 Dainippon Screen Mfg. Co., Ltd. Fly eye lens unit for illumination
WO1999027406A1 (en) * 1997-11-24 1999-06-03 Svyatoslav Ivanovich Arsenich Optical raster condenser and optical device comprising said raster condenser

Also Published As

Publication number Publication date
FR2526962B1 (enrdf_load_stackoverflow) 1985-01-25

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Legal Events

Date Code Title Description
ST Notification of lapse