FR2524245B1 - - Google Patents

Info

Publication number
FR2524245B1
FR2524245B1 FR8205239A FR8205239A FR2524245B1 FR 2524245 B1 FR2524245 B1 FR 2524245B1 FR 8205239 A FR8205239 A FR 8205239A FR 8205239 A FR8205239 A FR 8205239A FR 2524245 B1 FR2524245 B1 FR 2524245B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8205239A
Other languages
French (fr)
Other versions
FR2524245A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AXENOV IVAN
Original Assignee
AXENOV IVAN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/360,447 external-priority patent/US4452686A/en
Application filed by AXENOV IVAN filed Critical AXENOV IVAN
Publication of FR2524245A1 publication Critical patent/FR2524245A1/fr
Application granted granted Critical
Publication of FR2524245B1 publication Critical patent/FR2524245B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/40—Details, e.g. electrodes, nozzles using applied magnetic fields, e.g. for focusing or rotating the arc
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma Technology (AREA)
FR8205239A 1982-03-22 1982-03-26 Source de plasma a arc electrique et dispositif pour traitement au plasma des surfaces utilisant cette source Granted FR2524245A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/360,447 US4452686A (en) 1982-03-22 1982-03-22 Arc plasma generator and a plasma arc apparatus for treating the surfaces of work-pieces, incorporating the same arc plasma generator

Publications (2)

Publication Number Publication Date
FR2524245A1 FR2524245A1 (fr) 1983-09-30
FR2524245B1 true FR2524245B1 (hu) 1984-06-29

Family

ID=23417983

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8205239A Granted FR2524245A1 (fr) 1982-03-22 1982-03-26 Source de plasma a arc electrique et dispositif pour traitement au plasma des surfaces utilisant cette source

Country Status (3)

Country Link
CH (1) CH657242A5 (hu)
DE (1) DE3211264C2 (hu)
FR (1) FR2524245A1 (hu)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE58909180D1 (de) * 1988-03-23 1995-05-24 Balzers Hochvakuum Verfahren und Anlage zur Beschichtung von Werkstücken.
DE4006456C1 (en) * 1990-03-01 1991-05-29 Balzers Ag, Balzers, Li Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
DE19711347C2 (de) * 1997-03-18 2000-10-05 Forschungszentrum Juelich Gmbh Beschichtungsvorrichtung auf Basis eines kathodischen Lichtbogens
UA101443C2 (ru) * 2011-11-29 2013-03-25 Национальный Научный Центр "Харьковский Физико-Технический Институт" Анодный УЗЕЛ вакуумно-дугового ИСТОЧНИКа катодной ПЛАЗМЫ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
US3900585A (en) * 1972-02-12 1975-08-19 Agency Ind Science Techn Method for control of ionization electrostatic plating
SU563826A1 (ru) * 1975-06-04 1978-03-05 Предприятие П/Я В-8851 Устройство дл нанесени тонких пленок
JPS54110988A (en) * 1978-01-31 1979-08-30 Nii Chiefunorogii Afutomobirin Coating vacuum evaporation apparatus
SU1040631A1 (ru) * 1980-06-25 1983-09-07 Предприятие П/Я В-8851 Вакуумно-дуговое устройство

Also Published As

Publication number Publication date
CH657242A5 (de) 1986-08-15
DE3211264A1 (de) 1983-10-06
DE3211264C2 (de) 1984-10-31
FR2524245A1 (fr) 1983-09-30

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Legal Events

Date Code Title Description
ST Notification of lapse