FR2523113B1 - - Google Patents
Info
- Publication number
- FR2523113B1 FR2523113B1 FR8204020A FR8204020A FR2523113B1 FR 2523113 B1 FR2523113 B1 FR 2523113B1 FR 8204020 A FR8204020 A FR 8204020A FR 8204020 A FR8204020 A FR 8204020A FR 2523113 B1 FR2523113 B1 FR 2523113B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8204020A FR2523113A1 (fr) | 1982-03-10 | 1982-03-10 | Procede de regeneration des chlorosilanes et de l'hydrogene non entres en reaction lors de l'obtention de silicium semi-conducteur polycristallin; chlorosilanes et hydrogene regeneres par ledit procede |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8204020A FR2523113A1 (fr) | 1982-03-10 | 1982-03-10 | Procede de regeneration des chlorosilanes et de l'hydrogene non entres en reaction lors de l'obtention de silicium semi-conducteur polycristallin; chlorosilanes et hydrogene regeneres par ledit procede |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2523113A1 FR2523113A1 (fr) | 1983-09-16 |
| FR2523113B1 true FR2523113B1 (US20030199744A1-20031023-C00003.png) | 1985-03-08 |
Family
ID=9271828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8204020A Granted FR2523113A1 (fr) | 1982-03-10 | 1982-03-10 | Procede de regeneration des chlorosilanes et de l'hydrogene non entres en reaction lors de l'obtention de silicium semi-conducteur polycristallin; chlorosilanes et hydrogene regeneres par ledit procede |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2523113A1 (US20030199744A1-20031023-C00003.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6332925B1 (en) | 1996-05-23 | 2001-12-25 | Ebara Corporation | Evacuation system |
| US20020187096A1 (en) * | 2001-06-08 | 2002-12-12 | Kendig James Edward | Process for preparation of polycrystalline silicon |
| US7033561B2 (en) | 2001-06-08 | 2006-04-25 | Dow Corning Corporation | Process for preparation of polycrystalline silicon |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD48582A (US20030199744A1-20031023-C00003.png) * | ||||
| FR1267519A (fr) * | 1959-09-28 | 1961-07-21 | Siemens Ag | Procédé et dispositif pour récupérer les matières de départ non consommées lors de la préparation du silicium extra pur par réduction de silanes au moyen d'hydrogène |
| GB1144855A (en) * | 1966-04-04 | 1969-03-12 | Motorola Inc | System for making silicon |
| DE2918078A1 (de) * | 1979-05-04 | 1980-11-13 | Siemens Ag | Verfahren zur rueckgewinnung von bei der abscheidung von silicium durch thermische zersetzung anfallenden restgasen |
| DE2918060A1 (de) * | 1979-05-04 | 1980-11-13 | Siemens Ag | Verfahren zur rueckgewinnung von bei der abscheidung von silicium durch thermische zersetzung anfallenden restgasen |
-
1982
- 1982-03-10 FR FR8204020A patent/FR2523113A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2523113A1 (fr) | 1983-09-16 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |