FR2509055B1 - Systeme optique de formation d'images a haute resolution - Google Patents

Systeme optique de formation d'images a haute resolution

Info

Publication number
FR2509055B1
FR2509055B1 FR8211528A FR8211528A FR2509055B1 FR 2509055 B1 FR2509055 B1 FR 2509055B1 FR 8211528 A FR8211528 A FR 8211528A FR 8211528 A FR8211528 A FR 8211528A FR 2509055 B1 FR2509055 B1 FR 2509055B1
Authority
FR
France
Prior art keywords
optical system
high resolution
resolution image
image optical
resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8211528A
Other languages
English (en)
Other versions
FR2509055A1 (fr
Inventor
Kimiaki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of FR2509055A1 publication Critical patent/FR2509055A1/fr
Application granted granted Critical
Publication of FR2509055B1 publication Critical patent/FR2509055B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
FR8211528A 1981-07-06 1982-06-30 Systeme optique de formation d'images a haute resolution Expired FR2509055B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56104361A JPS587123A (ja) 1981-07-06 1981-07-06 高解像結像光学系

Publications (2)

Publication Number Publication Date
FR2509055A1 FR2509055A1 (fr) 1983-01-07
FR2509055B1 true FR2509055B1 (fr) 1986-05-16

Family

ID=14378688

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8211528A Expired FR2509055B1 (fr) 1981-07-06 1982-06-30 Systeme optique de formation d'images a haute resolution

Country Status (5)

Country Link
US (1) US4472023A (fr)
JP (1) JPS587123A (fr)
DE (1) DE3224791A1 (fr)
FR (1) FR2509055B1 (fr)
GB (1) GB2102981B (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2623093B2 (ja) * 1986-11-28 1997-06-25 富士写真フイルム株式会社 レーザ光学系
US7656504B1 (en) 1990-08-21 2010-02-02 Nikon Corporation Projection exposure apparatus with luminous flux distribution
US5638211A (en) 1990-08-21 1997-06-10 Nikon Corporation Method and apparatus for increasing the resolution power of projection lithography exposure system
JP2995820B2 (ja) 1990-08-21 1999-12-27 株式会社ニコン 露光方法及び方法，並びにデバイス製造方法
US6710855B2 (en) * 1990-11-15 2004-03-23 Nikon Corporation Projection exposure apparatus and method
US6252647B1 (en) 1990-11-15 2001-06-26 Nikon Corporation Projection exposure apparatus
US6885433B2 (en) * 1990-11-15 2005-04-26 Nikon Corporation Projection exposure apparatus and method
US6967710B2 (en) 1990-11-15 2005-11-22 Nikon Corporation Projection exposure apparatus and method
US5719704A (en) 1991-09-11 1998-02-17 Nikon Corporation Projection exposure apparatus
US6897942B2 (en) * 1990-11-15 2005-05-24 Nikon Corporation Projection exposure apparatus and method
US5592328A (en) * 1991-04-19 1997-01-07 Edge Scientific Instrument Company Llc Illumination system and method for a high definition light microscope
US5345333A (en) * 1991-04-19 1994-09-06 Unimat (Usa) Corporation Illumination system and method for a high definition light microscope
US5548441A (en) * 1991-04-19 1996-08-20 Edge Scientific Instrument Corp. Illumination system and method for a high definition light microscope
US5570228A (en) * 1991-04-19 1996-10-29 Edge Scientific Instrument Company Llc Fiber optic illumination system and method for a high definition light microscope
DE4404283A1 (de) * 1994-02-11 1995-08-17 Leica Mikroskopie & Syst Kondensorsystem für Mikroskope
DE69931690T2 (de) * 1998-04-08 2007-06-14 Asml Netherlands B.V. Lithographischer Apparat
TW587199B (en) 1999-09-29 2004-05-11 Asml Netherlands Bv Lithographic method and apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660923A (en) * 1949-10-06 1953-12-01 Bausch & Lomb Phase contrast apparatus for metallographic microscopes
DE825753C (de) * 1950-07-01 1951-12-20 Leitz Ernst Gmbh Phasenkontrasteinrichtung, insbesondere fuer Mikroskope
DE974173C (de) * 1953-09-13 1960-10-06 Freiberger Praez Smechanik Veb Einrichtung zur mikroskopischen Abbildung nicht selbstleuchtender Objekte, deren Einzelheiten keine oder zu geringe Helligkeits-unterschiede hervorrufen, durch Phasenkontrast
FR1517701A (fr) * 1966-03-28 1968-03-22 Centre Nat Rech Scient Perfectionnements aux instruments optiques pour la projection et la reproduction agrandie ou réduite ainsi que pour l'observation usuelle
PL68411A6 (fr) * 1969-05-26 1973-02-28
JPS5612615A (en) * 1979-07-12 1981-02-07 Olympus Optical Co Ltd High rosolution microscope

Also Published As

Publication number Publication date
JPH0381129B2 (fr) 1991-12-27
GB2102981B (en) 1985-03-13
GB2102981A (en) 1983-02-09
JPS587123A (ja) 1983-01-14
US4472023A (en) 1984-09-18
FR2509055A1 (fr) 1983-01-07
DE3224791A1 (de) 1983-01-20

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Legal Events

Date Code Title Description
ST Notification of lapse