FR2505712A1 - Machine a polir automatique, pour plaquettes minces, fragiles et deformables - Google Patents

Machine a polir automatique, pour plaquettes minces, fragiles et deformables Download PDF

Info

Publication number
FR2505712A1
FR2505712A1 FR8110183A FR8110183A FR2505712A1 FR 2505712 A1 FR2505712 A1 FR 2505712A1 FR 8110183 A FR8110183 A FR 8110183A FR 8110183 A FR8110183 A FR 8110183A FR 2505712 A1 FR2505712 A1 FR 2505712A1
Authority
FR
France
Prior art keywords
support
cassette
polishing
vertical
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8110183A
Other languages
English (en)
French (fr)
Other versions
FR2505712B1 (enExample
Inventor
Lucien Grisel
Gabriel Bouladon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PROCEDES EQUIP SCIENCES IND SA
Original Assignee
PROCEDES EQUIP SCIENCES IND SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PROCEDES EQUIP SCIENCES IND SA filed Critical PROCEDES EQUIP SCIENCES IND SA
Priority to FR8110183A priority Critical patent/FR2505712A1/fr
Priority to JP57084679A priority patent/JPS57201168A/ja
Publication of FR2505712A1 publication Critical patent/FR2505712A1/fr
Application granted granted Critical
Publication of FR2505712B1 publication Critical patent/FR2505712B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/005—Feeding or manipulating devices specially adapted to grinding machines

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR8110183A 1981-05-18 1981-05-18 Machine a polir automatique, pour plaquettes minces, fragiles et deformables Granted FR2505712A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR8110183A FR2505712A1 (fr) 1981-05-18 1981-05-18 Machine a polir automatique, pour plaquettes minces, fragiles et deformables
JP57084679A JPS57201168A (en) 1981-05-18 1982-05-18 Automatic grinder for thin fragile wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8110183A FR2505712A1 (fr) 1981-05-18 1981-05-18 Machine a polir automatique, pour plaquettes minces, fragiles et deformables

Publications (2)

Publication Number Publication Date
FR2505712A1 true FR2505712A1 (fr) 1982-11-19
FR2505712B1 FR2505712B1 (enExample) 1985-01-11

Family

ID=9258757

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8110183A Granted FR2505712A1 (fr) 1981-05-18 1981-05-18 Machine a polir automatique, pour plaquettes minces, fragiles et deformables

Country Status (2)

Country Link
JP (1) JPS57201168A (enExample)
FR (1) FR2505712A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0245289A4 (en) * 1985-11-01 1989-01-24 Motorola Inc POLISHING SYSTEM WITH UNDERWATER BERNOULLI REMOVAL.
EP0354586A3 (en) * 1988-08-12 1991-11-27 Shin-Etsu Handotai Company Limited Method of automatically chamfering a wafer and apparatus therefor
US6273802B1 (en) 1993-09-19 2001-08-14 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6283822B1 (en) 1995-08-21 2001-09-04 Ebara Corporation Polishing apparatus
FR2843320A1 (fr) * 2002-08-12 2004-02-13 Procedes & Equipement Pour Les Dispositif de preparation d'echantillons metallographiques automatique

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3261131A (en) * 1963-12-18 1966-07-19 Wilhelm Loh K G Loading mechanism for machines for working on optical lenses
US3680267A (en) * 1971-02-18 1972-08-01 Carmet Co Workpiece loading and unloading method and apparatus
FR2197333A5 (enExample) * 1972-08-24 1974-03-22 Crane Packing Co
US4062463A (en) * 1976-05-11 1977-12-13 Machine Technology, Inc. Automated single cassette load mechanism for scrubber
US4141180A (en) * 1977-09-21 1979-02-27 Kayex Corporation Polishing apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3261131A (en) * 1963-12-18 1966-07-19 Wilhelm Loh K G Loading mechanism for machines for working on optical lenses
US3680267A (en) * 1971-02-18 1972-08-01 Carmet Co Workpiece loading and unloading method and apparatus
FR2197333A5 (enExample) * 1972-08-24 1974-03-22 Crane Packing Co
US4062463A (en) * 1976-05-11 1977-12-13 Machine Technology, Inc. Automated single cassette load mechanism for scrubber
US4141180A (en) * 1977-09-21 1979-02-27 Kayex Corporation Polishing apparatus

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0245289A4 (en) * 1985-11-01 1989-01-24 Motorola Inc POLISHING SYSTEM WITH UNDERWATER BERNOULLI REMOVAL.
EP0354586A3 (en) * 1988-08-12 1991-11-27 Shin-Etsu Handotai Company Limited Method of automatically chamfering a wafer and apparatus therefor
US6273802B1 (en) 1993-09-19 2001-08-14 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6966821B2 (en) 1993-09-21 2005-11-22 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6425806B2 (en) 1993-09-21 2002-07-30 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6439971B2 (en) 1993-09-21 2002-08-27 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6443808B2 (en) 1993-09-21 2002-09-03 Kabushiki Kaisha Toshiba Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6547638B2 (en) 1993-09-21 2003-04-15 Ebara Corporation Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US7708618B2 (en) 1993-09-21 2010-05-04 Ebara Corporation Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
US6283822B1 (en) 1995-08-21 2001-09-04 Ebara Corporation Polishing apparatus
US6942541B2 (en) 1995-08-21 2005-09-13 Ebara Corporation Polishing apparatus
EP1389506A1 (fr) * 2002-08-12 2004-02-18 Procédés et équipements pour les sciences et l'industrie Dispositif de préparation d'échantillons métallographiques automatique
FR2843320A1 (fr) * 2002-08-12 2004-02-13 Procedes & Equipement Pour Les Dispositif de preparation d'echantillons metallographiques automatique

Also Published As

Publication number Publication date
JPS57201168A (en) 1982-12-09
FR2505712B1 (enExample) 1985-01-11

Similar Documents

Publication Publication Date Title
EP2931475B1 (fr) Dispositif de ponçage comprenant des moyens de changement de disque abrasif
FR2575630A1 (fr) Procede de montage d'elements de circuit du type puce sur des plaquettes de circuit imprime et appareil associe
FR2476963A1 (fr) Dispositif de montage sur un substrat de composants electroniques en forme de plaquettes ou de paves depourvus de fils de connexion
FR2711125A1 (fr) Chargeur pour machine d'impression pour objets présentés en pile.
CH649021A5 (fr) Machine a usiner par decharges electriques erosives.
CH703288B1 (fr) Procédé et dispositif de chargement automatique de pièces plates dans un dispositif d'alimentation de machines traitant de pièces plates, notamment des enveloppes.
EP0541503A1 (fr) Dispositif de transfert pour supports d'informations
FR2505712A1 (fr) Machine a polir automatique, pour plaquettes minces, fragiles et deformables
FR2842754A1 (fr) Dispositif pour le chargement-dechargement de toles d'une machine de decoupe
EP0145585A2 (fr) Dispositif de formation et de depot sur un substrat de couches monomoleculaires
WO1990002697A1 (fr) Installation pour le relevage rapide et l'empilage ou le desempilage de plaques de verre
EP0541689A1 (fr) Dispositif de positionnement a l'arret pour chariot de manutention.
CH618940A5 (enExample)
FR2501624A1 (fr) Procede de groupement, d'orientation et d'emballage d'objets et installation pour la mise en oeuvre de ce procede
EP0033689A1 (fr) Dispositif de transfert automatique d'objets
EP0435774B1 (fr) Dispositif de chargement et de déchargement d'objets plats dans une cassette de rangement
FR3004287A1 (fr) Systeme d'irradiation de faisceau d'energie et mecanisme de transfert de piece d'ouvrage
BE1028272A1 (fr) Trancheuse de pain oblique
FR2627761A1 (fr) Installation de transfert de plaques munie de moyens de positionnement
EP0128811B1 (fr) Perfectionnements aux dispositifs changeur d'outil pour machine-outil
FR2948648A1 (fr) Appareil d'extraction et de chargement de bacs dans un magasin de stockage
EP0012081B1 (fr) Dispositif de manutention pour le chargement et le déchargement de plaques, particulièrement de plaques de verre
FR2589429A1 (fr) Procede de changement automatique de plaques a alveoles dans des machines de remplissage de recipients, et dispositif pour la mise en oeuvre du procede
EP0165871A1 (fr) Procédé et dispositif pour la manipulation de plaquettes circulaires en vue de leur immatriculation par rayons laser
FR2476450A1 (fr) Dispositif pour travailler des objets en forme de feuille, notamment pour decouper des capes de cigares dans des feuilles de tabac

Legal Events

Date Code Title Description
ST Notification of lapse