FR2501861A1 - Ellipsometre comportant un prisme a reflexions totales - Google Patents
Ellipsometre comportant un prisme a reflexions totales Download PDFInfo
- Publication number
- FR2501861A1 FR2501861A1 FR8104867A FR8104867A FR2501861A1 FR 2501861 A1 FR2501861 A1 FR 2501861A1 FR 8104867 A FR8104867 A FR 8104867A FR 8104867 A FR8104867 A FR 8104867A FR 2501861 A1 FR2501861 A1 FR 2501861A1
- Authority
- FR
- France
- Prior art keywords
- prism
- enclosure
- light beam
- ellipsometer
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title description 11
- 230000010287 polarization Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 15
- 238000004458 analytical method Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 8
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract description 4
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 description 4
- 238000011065 in-situ storage Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 230000008034 disappearance Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8104867A FR2501861A1 (fr) | 1981-03-11 | 1981-03-11 | Ellipsometre comportant un prisme a reflexions totales |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8104867A FR2501861A1 (fr) | 1981-03-11 | 1981-03-11 | Ellipsometre comportant un prisme a reflexions totales |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2501861A1 true FR2501861A1 (fr) | 1982-09-17 |
| FR2501861B1 FR2501861B1 (enExample) | 1984-03-16 |
Family
ID=9256111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8104867A Granted FR2501861A1 (fr) | 1981-03-11 | 1981-03-11 | Ellipsometre comportant un prisme a reflexions totales |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2501861A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0982580A1 (en) * | 1998-08-20 | 2000-03-01 | Olympus Optical Co., Ltd. | Ellipsometer |
| EP1103784A3 (en) * | 1999-11-26 | 2002-06-19 | Olympus Optical Co., Ltd. | Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3563633A (en) * | 1968-06-27 | 1971-02-16 | Eastman Kodak Co | Phase-compensated trihedral reflectors for interferometer systems |
-
1981
- 1981-03-11 FR FR8104867A patent/FR2501861A1/fr active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3563633A (en) * | 1968-06-27 | 1971-02-16 | Eastman Kodak Co | Phase-compensated trihedral reflectors for interferometer systems |
Non-Patent Citations (4)
| Title |
|---|
| EXBK/71 * |
| EXBK/75 * |
| EXBK/76 * |
| EXBK/78 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0982580A1 (en) * | 1998-08-20 | 2000-03-01 | Olympus Optical Co., Ltd. | Ellipsometer |
| EP1103784A3 (en) * | 1999-11-26 | 2002-06-19 | Olympus Optical Co., Ltd. | Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer |
| US6621578B1 (en) | 1999-11-26 | 2003-09-16 | Olympus Optical Co, Ltd. | Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2501861B1 (enExample) | 1984-03-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |