FR2498010B1 - - Google Patents

Info

Publication number
FR2498010B1
FR2498010B1 FR8100396A FR8100396A FR2498010B1 FR 2498010 B1 FR2498010 B1 FR 2498010B1 FR 8100396 A FR8100396 A FR 8100396A FR 8100396 A FR8100396 A FR 8100396A FR 2498010 B1 FR2498010 B1 FR 2498010B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8100396A
Other languages
French (fr)
Other versions
FR2498010A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KREINDEL JULY
Original Assignee
KREINDEL JULY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KREINDEL JULY filed Critical KREINDEL JULY
Priority to FR8100396A priority Critical patent/FR2498010A1/fr
Publication of FR2498010A1 publication Critical patent/FR2498010A1/fr
Application granted granted Critical
Publication of FR2498010B1 publication Critical patent/FR2498010B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR8100396A 1981-01-12 1981-01-12 Source d'electrons et d'ions Granted FR2498010A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8100396A FR2498010A1 (fr) 1981-01-12 1981-01-12 Source d'electrons et d'ions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8100396A FR2498010A1 (fr) 1981-01-12 1981-01-12 Source d'electrons et d'ions

Publications (2)

Publication Number Publication Date
FR2498010A1 FR2498010A1 (fr) 1982-07-16
FR2498010B1 true FR2498010B1 (en, 2012) 1983-08-26

Family

ID=9254030

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8100396A Granted FR2498010A1 (fr) 1981-01-12 1981-01-12 Source d'electrons et d'ions

Country Status (1)

Country Link
FR (1) FR2498010A1 (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2618602B1 (fr) * 1987-07-22 1990-01-05 Centre Nat Rech Scient Source d'electrons
DE19813589C2 (de) * 1998-03-27 2002-06-20 Karlsruhe Forschzent Verfahren zum Erzeugen eines gepulsten Elektronenstrahls und Elektronenstrahlquelle zur Durchführung des Verfahrens
ITBO20120320A1 (it) * 2012-06-11 2013-12-12 Libuse Skocdopolova Un apparato ed un metodo per la grenerazione di elettroni e di plasma da un getto di gas

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1452393A (fr) * 1964-10-26 1966-02-25 Atomic Energy Authority Uk Source ionique pour la production d'ions négatifs

Also Published As

Publication number Publication date
FR2498010A1 (fr) 1982-07-16

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Legal Events

Date Code Title Description
ST Notification of lapse