FR2497346A1 - Transducteur extensometrique a semi-conducteurs - Google Patents
Transducteur extensometrique a semi-conducteurs Download PDFInfo
- Publication number
- FR2497346A1 FR2497346A1 FR8027919A FR8027919A FR2497346A1 FR 2497346 A1 FR2497346 A1 FR 2497346A1 FR 8027919 A FR8027919 A FR 8027919A FR 8027919 A FR8027919 A FR 8027919A FR 2497346 A1 FR2497346 A1 FR 2497346A1
- Authority
- FR
- France
- Prior art keywords
- extensometric
- silicon
- transducer
- temperature
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 21
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 33
- 239000010703 silicon Substances 0.000 claims abstract description 33
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 22
- 239000010980 sapphire Substances 0.000 claims abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 30
- 239000007787 solid Substances 0.000 claims description 2
- 239000012528 membrane Substances 0.000 abstract description 14
- 230000000694 effects Effects 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 102100032215 Cathepsin E Human genes 0.000 description 3
- 101000869031 Homo sapiens Cathepsin E Proteins 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8027919A FR2497346A1 (fr) | 1980-12-31 | 1980-12-31 | Transducteur extensometrique a semi-conducteurs |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8027919A FR2497346A1 (fr) | 1980-12-31 | 1980-12-31 | Transducteur extensometrique a semi-conducteurs |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2497346A1 true FR2497346A1 (fr) | 1982-07-02 |
| FR2497346B1 FR2497346B1 (enrdf_load_html_response) | 1983-11-18 |
Family
ID=9249708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8027919A Granted FR2497346A1 (fr) | 1980-12-31 | 1980-12-31 | Transducteur extensometrique a semi-conducteurs |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2497346A1 (enrdf_load_html_response) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2594546A1 (fr) * | 1986-02-19 | 1987-08-21 | Flopetrol | Dispositif de mesure de la temperature du diaphragme d'un capteur de pression |
| FR2598804A1 (fr) * | 1986-05-14 | 1987-11-20 | Bosch Gmbh Robert | Capteur pour la determination de phenomenes physiques dans la chambre de combustion d'un moteur a combustion interne |
| EP0225095A3 (en) * | 1985-11-15 | 1989-10-18 | Transamerica Delaval Inc. | Biaxial strain gage systems |
| FR2776384A1 (fr) * | 1998-03-20 | 1999-09-24 | Snecma | Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL267563A (enrdf_load_html_response) * | 1900-01-01 |
-
1980
- 1980-12-31 FR FR8027919A patent/FR2497346A1/fr active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL267563A (enrdf_load_html_response) * | 1900-01-01 |
Non-Patent Citations (1)
| Title |
|---|
| EXBK/71 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0225095A3 (en) * | 1985-11-15 | 1989-10-18 | Transamerica Delaval Inc. | Biaxial strain gage systems |
| FR2594546A1 (fr) * | 1986-02-19 | 1987-08-21 | Flopetrol | Dispositif de mesure de la temperature du diaphragme d'un capteur de pression |
| FR2598804A1 (fr) * | 1986-05-14 | 1987-11-20 | Bosch Gmbh Robert | Capteur pour la determination de phenomenes physiques dans la chambre de combustion d'un moteur a combustion interne |
| FR2776384A1 (fr) * | 1998-03-20 | 1999-09-24 | Snecma | Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures |
| WO1999049288A1 (fr) * | 1998-03-20 | 1999-09-30 | Societe Nationale D'etude Et De Construction De Moteurs D'aviation - Snecma | Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures |
| US6314815B1 (en) | 1998-03-20 | 2001-11-13 | Societe Nationale D'etude Et De Construction De Moteurs D'aviation - S.N.E.C.M.A. | Pressure sensor with compensation for null shift non-linearity at very low temperatures |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2497346B1 (enrdf_load_html_response) | 1983-11-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |