FR2492960B1 - - Google Patents

Info

Publication number
FR2492960B1
FR2492960B1 FR8022661A FR8022661A FR2492960B1 FR 2492960 B1 FR2492960 B1 FR 2492960B1 FR 8022661 A FR8022661 A FR 8022661A FR 8022661 A FR8022661 A FR 8022661A FR 2492960 B1 FR2492960 B1 FR 2492960B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8022661A
Other languages
French (fr)
Other versions
FR2492960A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EFCIS
Original Assignee
EFCIS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EFCIS filed Critical EFCIS
Priority to FR8022661A priority Critical patent/FR2492960A1/fr
Publication of FR2492960A1 publication Critical patent/FR2492960A1/fr
Application granted granted Critical
Publication of FR2492960B1 publication Critical patent/FR2492960B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C30B31/103—Mechanisms for moving either the charge or heater

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR8022661A 1980-10-23 1980-10-23 Canne refractaire pour l'introduction et le retrait d'une nacelle dans un four de traitement chimique sous flux gazeux, et four utilisant une telle canne Granted FR2492960A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8022661A FR2492960A1 (fr) 1980-10-23 1980-10-23 Canne refractaire pour l'introduction et le retrait d'une nacelle dans un four de traitement chimique sous flux gazeux, et four utilisant une telle canne

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8022661A FR2492960A1 (fr) 1980-10-23 1980-10-23 Canne refractaire pour l'introduction et le retrait d'une nacelle dans un four de traitement chimique sous flux gazeux, et four utilisant une telle canne

Publications (2)

Publication Number Publication Date
FR2492960A1 FR2492960A1 (fr) 1982-04-30
FR2492960B1 true FR2492960B1 (OSRAM) 1984-10-19

Family

ID=9247227

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8022661A Granted FR2492960A1 (fr) 1980-10-23 1980-10-23 Canne refractaire pour l'introduction et le retrait d'une nacelle dans un four de traitement chimique sous flux gazeux, et four utilisant une telle canne

Country Status (1)

Country Link
FR (1) FR2492960A1 (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842794A (en) * 1973-06-29 1974-10-22 Ibm Apparatus for high temperature semiconductor processing

Also Published As

Publication number Publication date
FR2492960A1 (fr) 1982-04-30

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Legal Events

Date Code Title Description
ST Notification of lapse