FR2491258B1 - - Google Patents
Info
- Publication number
- FR2491258B1 FR2491258B1 FR8020843A FR8020843A FR2491258B1 FR 2491258 B1 FR2491258 B1 FR 2491258B1 FR 8020843 A FR8020843 A FR 8020843A FR 8020843 A FR8020843 A FR 8020843A FR 2491258 B1 FR2491258 B1 FR 2491258B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8020843A FR2491258A1 (fr) | 1980-09-29 | 1980-09-29 | Dispositif optoelectronique pour appareils a sonde electronique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8020843A FR2491258A1 (fr) | 1980-09-29 | 1980-09-29 | Dispositif optoelectronique pour appareils a sonde electronique |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2491258A1 FR2491258A1 (fr) | 1982-04-02 |
| FR2491258B1 true FR2491258B1 (enExample) | 1982-11-12 |
Family
ID=9246373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8020843A Granted FR2491258A1 (fr) | 1980-09-29 | 1980-09-29 | Dispositif optoelectronique pour appareils a sonde electronique |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2491258A1 (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1290240A (enExample) * | 1969-06-13 | 1972-09-20 |
-
1980
- 1980-09-29 FR FR8020843A patent/FR2491258A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2491258A1 (fr) | 1982-04-02 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |