FR2491258A1 - Dispositif optoelectronique pour appareils a sonde electronique - Google Patents
Dispositif optoelectronique pour appareils a sonde electronique Download PDFInfo
- Publication number
- FR2491258A1 FR2491258A1 FR8020843A FR8020843A FR2491258A1 FR 2491258 A1 FR2491258 A1 FR 2491258A1 FR 8020843 A FR8020843 A FR 8020843A FR 8020843 A FR8020843 A FR 8020843A FR 2491258 A1 FR2491258 A1 FR 2491258A1
- Authority
- FR
- France
- Prior art keywords
- lenses
- inner core
- magnetic
- optoelectronic device
- electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 45
- 230000005693 optoelectronics Effects 0.000 title claims description 51
- 239000000523 sample Substances 0.000 claims description 21
- 238000004804 winding Methods 0.000 claims description 8
- 230000005284 excitation Effects 0.000 claims description 7
- 230000004907 flux Effects 0.000 abstract description 6
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000012141 concentrate Substances 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 238000010276 construction Methods 0.000 description 14
- 238000010894 electron beam technology Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241001464057 Electroma Species 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8020843A FR2491258A1 (fr) | 1980-09-29 | 1980-09-29 | Dispositif optoelectronique pour appareils a sonde electronique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8020843A FR2491258A1 (fr) | 1980-09-29 | 1980-09-29 | Dispositif optoelectronique pour appareils a sonde electronique |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2491258A1 true FR2491258A1 (fr) | 1982-04-02 |
| FR2491258B1 FR2491258B1 (enExample) | 1982-11-12 |
Family
ID=9246373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8020843A Granted FR2491258A1 (fr) | 1980-09-29 | 1980-09-29 | Dispositif optoelectronique pour appareils a sonde electronique |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2491258A1 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3643191A (en) * | 1969-06-13 | 1972-02-15 | Hitachi Ltd | Electron lens for electron microscope and the like |
-
1980
- 1980-09-29 FR FR8020843A patent/FR2491258A1/fr active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3643191A (en) * | 1969-06-13 | 1972-02-15 | Hitachi Ltd | Electron lens for electron microscope and the like |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2491258B1 (enExample) | 1982-11-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |