FR2477298B1 - Positionneur de piece d'ouvrage adressable x-y possedant un detecteur de reperes d'adresse x-y perfectionne - Google Patents

Positionneur de piece d'ouvrage adressable x-y possedant un detecteur de reperes d'adresse x-y perfectionne

Info

Publication number
FR2477298B1
FR2477298B1 FR8004453A FR8004453A FR2477298B1 FR 2477298 B1 FR2477298 B1 FR 2477298B1 FR 8004453 A FR8004453 A FR 8004453A FR 8004453 A FR8004453 A FR 8004453A FR 2477298 B1 FR2477298 B1 FR 2477298B1
Authority
FR
France
Prior art keywords
improved
address mark
mark detector
workpiece positioner
addressable workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8004453A
Other languages
English (en)
Other versions
FR2477298A1 (fr
Inventor
Edwards H Philips
Karl-Heinz Johannsmeier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optimetrix Corp
Original Assignee
Optimetrix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optimetrix Corp filed Critical Optimetrix Corp
Priority to FR8004453A priority Critical patent/FR2477298B1/fr
Publication of FR2477298A1 publication Critical patent/FR2477298A1/fr
Application granted granted Critical
Publication of FR2477298B1 publication Critical patent/FR2477298B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR8004453A 1980-02-28 1980-02-28 Positionneur de piece d'ouvrage adressable x-y possedant un detecteur de reperes d'adresse x-y perfectionne Expired FR2477298B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8004453A FR2477298B1 (fr) 1980-02-28 1980-02-28 Positionneur de piece d'ouvrage adressable x-y possedant un detecteur de reperes d'adresse x-y perfectionne

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8004453A FR2477298B1 (fr) 1980-02-28 1980-02-28 Positionneur de piece d'ouvrage adressable x-y possedant un detecteur de reperes d'adresse x-y perfectionne

Publications (2)

Publication Number Publication Date
FR2477298A1 FR2477298A1 (fr) 1981-09-04
FR2477298B1 true FR2477298B1 (fr) 1987-05-29

Family

ID=9239110

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8004453A Expired FR2477298B1 (fr) 1980-02-28 1980-02-28 Positionneur de piece d'ouvrage adressable x-y possedant un detecteur de reperes d'adresse x-y perfectionne

Country Status (1)

Country Link
FR (1) FR2477298B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3447488A1 (de) * 1984-10-19 1986-05-07 Canon K.K., Tokio/Tokyo Projektionseinrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52109875A (en) * 1976-02-25 1977-09-14 Hitachi Ltd Position matching system for mask and wafer and its unit
FR2388371A1 (fr) * 1977-04-20 1978-11-17 Thomson Csf Procede d'alignement, dans un photorepeteur, d'une plaquette semi-conductrice et des motifs a y projeter et photorepeteur mettant en oeuvre un tel procede

Also Published As

Publication number Publication date
FR2477298A1 (fr) 1981-09-04

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Legal Events

Date Code Title Description
ER Errata listed in the french official journal (bopi)

Free format text: 36/81

TP Transmission of property
ST Notification of lapse