FR2469259B1 - - Google Patents

Info

Publication number
FR2469259B1
FR2469259B1 FR7920292A FR7920292A FR2469259B1 FR 2469259 B1 FR2469259 B1 FR 2469259B1 FR 7920292 A FR7920292 A FR 7920292A FR 7920292 A FR7920292 A FR 7920292A FR 2469259 B1 FR2469259 B1 FR 2469259B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7920292A
Other languages
French (fr)
Other versions
FR2469259A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR7920292A priority Critical patent/FR2469259A1/fr
Publication of FR2469259A1 publication Critical patent/FR2469259A1/fr
Application granted granted Critical
Publication of FR2469259B1 publication Critical patent/FR2469259B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/003—Multipurpose machines; Equipment therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
FR7920292A 1979-08-08 1979-08-08 Procede d'elaboration de plaquettes de materiaux durs, notamment de silicium et appareil de mise en oeuvre du procede Granted FR2469259A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7920292A FR2469259A1 (fr) 1979-08-08 1979-08-08 Procede d'elaboration de plaquettes de materiaux durs, notamment de silicium et appareil de mise en oeuvre du procede

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7920292A FR2469259A1 (fr) 1979-08-08 1979-08-08 Procede d'elaboration de plaquettes de materiaux durs, notamment de silicium et appareil de mise en oeuvre du procede

Publications (2)

Publication Number Publication Date
FR2469259A1 FR2469259A1 (fr) 1981-05-22
FR2469259B1 true FR2469259B1 (OSRAM) 1981-10-30

Family

ID=9228720

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7920292A Granted FR2469259A1 (fr) 1979-08-08 1979-08-08 Procede d'elaboration de plaquettes de materiaux durs, notamment de silicium et appareil de mise en oeuvre du procede

Country Status (1)

Country Link
FR (1) FR2469259A1 (OSRAM)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667650A (en) * 1985-11-21 1987-05-26 Pq Corporation Mounting beam for preparing wafers
DD250892B1 (de) * 1986-07-10 1988-12-14 Pieck W Wohnbauk Veb Vorrichtung zum fraesen der sichtflaechen von werkstuecken
EP0313714B1 (en) * 1987-10-29 1993-10-13 Tokyo Seimitsu Co.,Ltd. Apparatus and method for slicing a wafer
DE3737540C1 (de) * 1987-11-05 1989-06-22 Mueller Georg Nuernberg Verfahren und Maschine zum Herstellen von Ronden mit zumindest einer planen Oberflaeche
US5111622A (en) * 1989-05-18 1992-05-12 Silicon Technology Corporation Slicing and grinding system for a wafer slicing machine
JPH0767692B2 (ja) * 1989-09-07 1995-07-26 株式会社東京精密 スライシングマシンの切断方法
US5185956A (en) * 1990-05-18 1993-02-16 Silicon Technology Corporation Wafer slicing and grinding system
DE4134110A1 (de) * 1991-10-15 1993-04-22 Wacker Chemitronic Verfahren zum rotationssaegen sproedharter werkstoffe, insbesondere solcher mit durchmessern ueber 200 mm in duenne scheiben vermittels innenlochsaege und vorrichtung zur durchfuehrung des verfahrens
JP3060445B2 (ja) * 1992-07-16 2000-07-10 株式会社東京精密 半導体ウエハのスライシング方法及びその装置
JP3174484B2 (ja) * 1995-06-30 2001-06-11 株式会社東京精密 平面研削内周刃切断複合加工機

Also Published As

Publication number Publication date
FR2469259A1 (fr) 1981-05-22

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Legal Events

Date Code Title Description
ST Notification of lapse