FR2465007B1 - - Google Patents

Info

Publication number
FR2465007B1
FR2465007B1 FR7923148A FR7923148A FR2465007B1 FR 2465007 B1 FR2465007 B1 FR 2465007B1 FR 7923148 A FR7923148 A FR 7923148A FR 7923148 A FR7923148 A FR 7923148A FR 2465007 B1 FR2465007 B1 FR 2465007B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7923148A
Other languages
French (fr)
Other versions
FR2465007A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to FR7923148A priority Critical patent/FR2465007A1/fr
Publication of FR2465007A1 publication Critical patent/FR2465007A1/fr
Application granted granted Critical
Publication of FR2465007B1 publication Critical patent/FR2465007B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7923148A 1979-09-17 1979-09-17 Dispositif a plusieurs sas pour revetir sous vide des charges successives de substrats Granted FR2465007A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7923148A FR2465007A1 (fr) 1979-09-17 1979-09-17 Dispositif a plusieurs sas pour revetir sous vide des charges successives de substrats

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7923148A FR2465007A1 (fr) 1979-09-17 1979-09-17 Dispositif a plusieurs sas pour revetir sous vide des charges successives de substrats

Publications (2)

Publication Number Publication Date
FR2465007A1 FR2465007A1 (fr) 1981-03-20
FR2465007B1 true FR2465007B1 (OSRAM) 1984-04-27

Family

ID=9229713

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7923148A Granted FR2465007A1 (fr) 1979-09-17 1979-09-17 Dispositif a plusieurs sas pour revetir sous vide des charges successives de substrats

Country Status (1)

Country Link
FR (1) FR2465007A1 (OSRAM)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3086882A (en) * 1958-07-02 1963-04-23 Libbey Owens Ford Glass Co Method and apparatus for filming articles by vacuum deposition
US3656454A (en) * 1970-11-23 1972-04-18 Air Reduction Vacuum coating apparatus
DE2505275C3 (de) * 1974-02-11 1981-09-17 Ukrainskij naučno-issledovatel'skij institut special'nych stalej splavov i ferrosplavov, Zaporož'e Vorrichtung zum kontinuierlichen Bedampfen von metallischen Bändern im Vakuum

Also Published As

Publication number Publication date
FR2465007A1 (fr) 1981-03-20

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Legal Events

Date Code Title Description
ST Notification of lapse