FR2448147B1 - - Google Patents
Info
- Publication number
- FR2448147B1 FR2448147B1 FR8002005A FR8002005A FR2448147B1 FR 2448147 B1 FR2448147 B1 FR 2448147B1 FR 8002005 A FR8002005 A FR 8002005A FR 8002005 A FR8002005 A FR 8002005A FR 2448147 B1 FR2448147 B1 FR 2448147B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54011101A JPS5922371B2 (ja) | 1979-02-01 | 1979-02-01 | パタ−ンの欠陥検査装置 |
| JP1110079A JPS55103724A (en) | 1979-02-01 | 1979-02-01 | Pattern defectiveness inspecting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2448147A1 FR2448147A1 (fr) | 1980-08-29 |
| FR2448147B1 true FR2448147B1 (US06168776-20010102-C00041.png) | 1983-06-10 |
Family
ID=26346485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8002005A Granted FR2448147A1 (fr) | 1979-02-01 | 1980-01-30 | Appareil destine a la detection des defauts de motifs |
Country Status (5)
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0617777B2 (ja) * | 1984-06-02 | 1994-03-09 | 大日本スクリーン製造株式会社 | プリント配線板の撮像方法 |
| JPS62180250A (ja) * | 1986-02-05 | 1987-08-07 | Omron Tateisi Electronics Co | 部品実装基板の検査方法 |
| US4908702A (en) * | 1988-04-29 | 1990-03-13 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Real-time image difference detection using a polarization rotation spacial light modulator |
| JPH02170279A (ja) * | 1988-12-23 | 1990-07-02 | Hitachi Ltd | 被検査対象パターンの欠陥検出方法及びその装置 |
| GB9008632D0 (en) * | 1990-04-17 | 1990-06-13 | Leicester Polytechnic | Inspecting garments |
| DE4102122C2 (de) * | 1990-12-08 | 1994-02-17 | Schoeller Felix Jun Papier | Verfahren zur visuellen Kontrolle der Formation von einer in einer Richtung bewegten Bahn aus fotografischem Basispapier oder Basiskarton |
| US5642198A (en) * | 1995-04-03 | 1997-06-24 | Long; William R. | Method of inspecting moving material |
| CN1359587A (zh) * | 1999-06-28 | 2002-07-17 | 阿诺托股份公司 | 信息记录方法 |
| US10557803B2 (en) * | 2018-06-26 | 2020-02-11 | Onto Innovation Inc. | Surface height determination of transparent film |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2827822A (en) * | 1953-02-02 | 1958-03-25 | Ross L Timms | Apparatus for identifying printed documents and the like as genuine |
| GB873790A (en) * | 1957-10-29 | 1961-07-26 | Fernseh Gmbh | Improvements in or relating to apparatus for the comparison of objects |
| US3411007A (en) * | 1964-10-27 | 1968-11-12 | Bunker Ramo | Radiation sensitive optical system for matching complementary codes |
| US3560093A (en) * | 1968-07-16 | 1971-02-02 | Western Electric Co | Superimposed common carrier mask inspection system |
| US3698821A (en) * | 1971-08-19 | 1972-10-17 | Burroughs Corp | Method and apparatus for inspecting plated-through printed circuit board holes |
| US3713741A (en) * | 1972-01-03 | 1973-01-30 | Western Electric Co | Methods of and apparatus for locating solder faults |
| US3778166A (en) * | 1973-02-26 | 1973-12-11 | Gte Sylvania Inc | Bipolar area correlator |
| JPS5265671A (en) * | 1975-11-26 | 1977-05-31 | Nippon Jidoseigyo Ltd | Apparatus for testing defects in pattern |
-
1980
- 1980-01-29 DE DE19803003133 patent/DE3003133A1/de active Granted
- 1980-01-29 US US06/116,450 patent/US4330712A/en not_active Expired - Lifetime
- 1980-01-30 GB GB8003055A patent/GB2043884B/en not_active Expired
- 1980-01-30 FR FR8002005A patent/FR2448147A1/fr active Granted
- 1980-01-31 CA CA344,801A patent/CA1126854A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE3003133A1 (de) | 1980-08-07 |
| DE3003133C2 (US06168776-20010102-C00041.png) | 1989-03-23 |
| CA1126854A (en) | 1982-06-29 |
| US4330712A (en) | 1982-05-18 |
| GB2043884B (en) | 1983-04-20 |
| FR2448147A1 (fr) | 1980-08-29 |
| GB2043884A (en) | 1980-10-08 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |