FR2429270B3 - - Google Patents
Info
- Publication number
- FR2429270B3 FR2429270B3 FR7818808A FR7818808A FR2429270B3 FR 2429270 B3 FR2429270 B3 FR 2429270B3 FR 7818808 A FR7818808 A FR 7818808A FR 7818808 A FR7818808 A FR 7818808A FR 2429270 B3 FR2429270 B3 FR 2429270B3
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7818808A FR2429270A1 (fr) | 1978-06-23 | 1978-06-23 | Appareil pour realiser dans une enceinte sous vide, le depot d'une couche mince sur un substrat ou l'erosion de la surface d'une piece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7818808A FR2429270A1 (fr) | 1978-06-23 | 1978-06-23 | Appareil pour realiser dans une enceinte sous vide, le depot d'une couche mince sur un substrat ou l'erosion de la surface d'une piece |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2429270A1 FR2429270A1 (fr) | 1980-01-18 |
FR2429270B3 true FR2429270B3 (fr) | 1981-03-20 |
Family
ID=9209896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7818808A Granted FR2429270A1 (fr) | 1978-06-23 | 1978-06-23 | Appareil pour realiser dans une enceinte sous vide, le depot d'une couche mince sur un substrat ou l'erosion de la surface d'une piece |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2429270A1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4756815A (en) * | 1979-12-21 | 1988-07-12 | Varian Associates, Inc. | Wafer coating system |
GB2119236A (en) * | 1982-03-26 | 1983-11-16 | Philips Electronic Associated | Magazine and disc holders for supporting discs in the magazine |
DE10032005B4 (de) * | 2000-06-30 | 2004-01-15 | Forschungszentrum Karlsruhe Gmbh | Waferhalterad mit einer Andrückvorrichtung in einer Waferbeschichtungsanlage |
DE10211827C1 (de) * | 2002-03-16 | 2003-10-30 | Karlsruhe Forschzent | Lagerung eines Substrathalterrades mit darin eingebautem/verankertem Substrathalter |
CN107155262A (zh) * | 2016-03-03 | 2017-09-12 | 深圳光启高等理工研究院 | 一种铜箔基材制备方法及应用其的超材料加工方法 |
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1978
- 1978-06-23 FR FR7818808A patent/FR2429270A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2429270A1 (fr) | 1980-01-18 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |