FR2415348B1 - - Google Patents

Info

Publication number
FR2415348B1
FR2415348B1 FR7901658A FR7901658A FR2415348B1 FR 2415348 B1 FR2415348 B1 FR 2415348B1 FR 7901658 A FR7901658 A FR 7901658A FR 7901658 A FR7901658 A FR 7901658A FR 2415348 B1 FR2415348 B1 FR 2415348B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7901658A
Other languages
French (fr)
Other versions
FR2415348A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of FR2415348A1 publication Critical patent/FR2415348A1/fr
Application granted granted Critical
Publication of FR2415348B1 publication Critical patent/FR2415348B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
FR7901658A 1978-01-24 1979-01-23 Procede et dispositif pour la correction des aberrations provoquees par deviation dans un appareil a rayonnement corpusculaire Granted FR2415348A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD20337678A DD135311A1 (de) 1978-01-24 1978-01-24 Verfahren und einrichtung zur korrektur der ablenkaberrationen in einem korpuskularstrahlgeraet

Publications (2)

Publication Number Publication Date
FR2415348A1 FR2415348A1 (fr) 1979-08-17
FR2415348B1 true FR2415348B1 (tr) 1984-10-12

Family

ID=5511337

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7901658A Granted FR2415348A1 (fr) 1978-01-24 1979-01-23 Procede et dispositif pour la correction des aberrations provoquees par deviation dans un appareil a rayonnement corpusculaire

Country Status (3)

Country Link
DD (1) DD135311A1 (tr)
DE (1) DE2901426A1 (tr)
FR (1) FR2415348A1 (tr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0175933A1 (de) * 1984-09-21 1986-04-02 Siemens Aktiengesellschaft Rasterlinsen-System ohne Ablenkfarbfehler zur Materialbearbeitung mit Korpuskularstrahlen
DE102010053194A1 (de) * 2010-12-03 2012-06-06 Carl Zeiss Nts Gmbh Teilchenstrahlgerät mit Ablenksystem

Also Published As

Publication number Publication date
DE2901426A1 (de) 1979-07-26
FR2415348A1 (fr) 1979-08-17
DD135311A1 (de) 1979-04-25

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Legal Events

Date Code Title Description
ST Notification of lapse