FR2414366A1 - Crystal pulling device - with hollow seed crystal bar and coaxial sliding drive shaft (CS 15.9.78) - Google Patents

Crystal pulling device - with hollow seed crystal bar and coaxial sliding drive shaft (CS 15.9.78)

Info

Publication number
FR2414366A1
FR2414366A1 FR7801245A FR7801245A FR2414366A1 FR 2414366 A1 FR2414366 A1 FR 2414366A1 FR 7801245 A FR7801245 A FR 7801245A FR 7801245 A FR7801245 A FR 7801245A FR 2414366 A1 FR2414366 A1 FR 2414366A1
Authority
FR
France
Prior art keywords
drive shaft
pulling device
seed crystal
bar
sliding drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7801245A
Other languages
French (fr)
Other versions
FR2414366B1 (en
Inventor
Vitaly Yakovlevich Apilat
Marx Izrailevich Litichevsky
Oleg Sergeevich Mjulendorf
Lev Georgievich Eidelman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INST MONOKRISTALLOV
Original Assignee
INST MONOKRISTALLOV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST MONOKRISTALLOV filed Critical INST MONOKRISTALLOV
Priority to FR7801245A priority Critical patent/FR2414366A1/en
Publication of FR2414366A1 publication Critical patent/FR2414366A1/en
Application granted granted Critical
Publication of FR2414366B1 publication Critical patent/FR2414366B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/32—Seed holders, e.g. chucks
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Abstract

A crystal pulling device has a hollow bar carrying the seed crystal. A drive shaft enters the hollow bar coaxially leaving spaces for the circulation of a coolant. A sleeve, which is flanged to the hollow bar, carries a key which can slide in a keyway of the drive shaft to allow an axial motion combined with a rotary motion. This reduces the possible oscillations during the transmission of the rotation from the drive shaft to the seed crystal bar to a minimum.
FR7801245A 1978-01-17 1978-01-17 Crystal pulling device - with hollow seed crystal bar and coaxial sliding drive shaft (CS 15.9.78) Granted FR2414366A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7801245A FR2414366A1 (en) 1978-01-17 1978-01-17 Crystal pulling device - with hollow seed crystal bar and coaxial sliding drive shaft (CS 15.9.78)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7801245A FR2414366A1 (en) 1978-01-17 1978-01-17 Crystal pulling device - with hollow seed crystal bar and coaxial sliding drive shaft (CS 15.9.78)

Publications (2)

Publication Number Publication Date
FR2414366A1 true FR2414366A1 (en) 1979-08-10
FR2414366B1 FR2414366B1 (en) 1980-07-18

Family

ID=9203550

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7801245A Granted FR2414366A1 (en) 1978-01-17 1978-01-17 Crystal pulling device - with hollow seed crystal bar and coaxial sliding drive shaft (CS 15.9.78)

Country Status (1)

Country Link
FR (1) FR2414366A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975036A (en) * 1956-10-05 1961-03-14 Motorola Inc Crystal pulling apparatus
US3238022A (en) * 1963-09-17 1966-03-01 Yorke Scient Corp Crystal puller
FR1579712A (en) * 1967-07-14 1969-08-29

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975036A (en) * 1956-10-05 1961-03-14 Motorola Inc Crystal pulling apparatus
US3238022A (en) * 1963-09-17 1966-03-01 Yorke Scient Corp Crystal puller
FR1579712A (en) * 1967-07-14 1969-08-29

Also Published As

Publication number Publication date
FR2414366B1 (en) 1980-07-18

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Legal Events

Date Code Title Description
ST Notification of lapse