FR2403645B2 - - Google Patents

Info

Publication number
FR2403645B2
FR2403645B2 FR7727785A FR7727785A FR2403645B2 FR 2403645 B2 FR2403645 B2 FR 2403645B2 FR 7727785 A FR7727785 A FR 7727785A FR 7727785 A FR7727785 A FR 7727785A FR 2403645 B2 FR2403645 B2 FR 2403645B2
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7727785A
Other languages
French (fr)
Other versions
FR2403645A2 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vide & Traitement SA
Original Assignee
Vide & Traitement SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vide & Traitement SA filed Critical Vide & Traitement SA
Priority to FR7727785A priority Critical patent/FR2403645A2/en
Priority to DE2811942A priority patent/DE2811942C2/en
Priority to JP53032290A priority patent/JPS6035428B2/en
Priority to GB11256/78A priority patent/GB1601244A/en
Priority to US05/888,536 priority patent/US4200805A/en
Priority to ES468158A priority patent/ES468158A1/en
Publication of FR2403645A2 publication Critical patent/FR2403645A2/en
Application granted granted Critical
Publication of FR2403645B2 publication Critical patent/FR2403645B2/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)
FR7727785A 1977-03-23 1977-09-14 Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge Granted FR2403645A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7727785A FR2403645A2 (en) 1977-09-14 1977-09-14 Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge
DE2811942A DE2811942C2 (en) 1977-03-23 1978-03-18 Furnace for the ionic nitriding treatment of metallic workpieces
JP53032290A JPS6035428B2 (en) 1977-03-23 1978-03-20 Multiple cathode thermal ionization furnace
GB11256/78A GB1601244A (en) 1977-03-23 1978-03-21 Multicathode thermochemical processing oven
US05/888,536 US4200805A (en) 1977-03-23 1978-03-21 Multicathode thermochemical processing oven
ES468158A ES468158A1 (en) 1977-03-23 1978-03-22 Multicathode thermochemical processing oven

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7727785A FR2403645A2 (en) 1977-09-14 1977-09-14 Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge

Publications (2)

Publication Number Publication Date
FR2403645A2 FR2403645A2 (en) 1979-04-13
FR2403645B2 true FR2403645B2 (en) 1981-08-21

Family

ID=9195395

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7727785A Granted FR2403645A2 (en) 1977-03-23 1977-09-14 Furnace for thermochemical metal treatment - ensures ion bombardment by anodes and cathodes without arc discharge

Country Status (1)

Country Link
FR (1) FR2403645A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3101351C2 (en) * 1981-01-17 1982-10-14 Klöckner Ionon GmbH, 5090 Leverkusen Device for hardening metallic workpieces with an evacuable chamber
DE3614398A1 (en) * 1985-07-01 1987-01-08 Balzers Hochvakuum Arrangement for the treatment of workpieces using an evacuatable chamber
FR2594102B1 (en) * 1986-02-12 1991-04-19 Stein Heurtey AUTOMATED FLEXIBLE INSTALLATION FOR FAST THERMOCHEMICAL TREATMENT
US5171369A (en) * 1988-08-18 1992-12-15 Jan Elwart Device for glow potential processing, in particular ionic carburation

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT364899A (en) * 1937-08-27
BE569245A (en) * 1953-12-09
FR2082217A5 (en) * 1970-03-06 1971-12-10 Cit Alcatel Substrate coating by cathodic sputtering andevaporation
GB1443827A (en) * 1973-04-27 1976-07-28 Triplex Safety Glass Co Reactive sputtering apparatus and cathode units therefor
FR2297927A1 (en) * 1975-01-17 1976-08-13 Anvar Thermochemical treatment of metal with ion bombardment - using a sealed discharge chamber, an electrode support and an arc detecting generator
DE2534779A1 (en) * 1975-08-04 1977-02-17 Paul Thome Material handling system for airtight chambers - uses connected holder system fitted with separating devices and sealing elements
US4109157A (en) * 1975-12-18 1978-08-22 Kawasaki Jukogyo Kabushiki Kaisha Apparatus for ion-nitriding

Also Published As

Publication number Publication date
FR2403645A2 (en) 1979-04-13

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Legal Events

Date Code Title Description
CD Change of name or company name
TP Transmission of property