FR2392492A1 - Dispositif d'etancheite pour la chambre a vide mobile d'une machine a faisceau de particules chargees - Google Patents

Dispositif d'etancheite pour la chambre a vide mobile d'une machine a faisceau de particules chargees

Info

Publication number
FR2392492A1
FR2392492A1 FR7815687A FR7815687A FR2392492A1 FR 2392492 A1 FR2392492 A1 FR 2392492A1 FR 7815687 A FR7815687 A FR 7815687A FR 7815687 A FR7815687 A FR 7815687A FR 2392492 A1 FR2392492 A1 FR 2392492A1
Authority
FR
France
Prior art keywords
component
vacuum
section
increased width
vacuum box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7815687A
Other languages
English (en)
Other versions
FR2392492B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steigerwald Strahltecknik GmbH
Original Assignee
Steigerwald Strahltecknik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB22620/77A external-priority patent/GB1604654A/en
Application filed by Steigerwald Strahltecknik GmbH filed Critical Steigerwald Strahltecknik GmbH
Publication of FR2392492A1 publication Critical patent/FR2392492A1/fr
Application granted granted Critical
Publication of FR2392492B1 publication Critical patent/FR2392492B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)

Abstract

Système d'étanchéité pour chambre à vide de machine de traitement d'une pièce par un faisceau de particules chargées. Pour améliorer l'étanchéité de la chambre à vide dans la zone de traitement, la zone d'étanchéité a une largeur augmentée dans le sens du déplacement relatif dans au moins l'une des sections d'entrée ou de sortie. Soudage par faisceau d'électrons.
FR7815687A 1977-05-27 1978-05-26 Dispositif d'etancheite pour la chambre a vide mobile d'une machine a faisceau de particules chargees Granted FR2392492A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB22620/77A GB1604654A (en) 1977-05-27 1977-05-27 Sealing system for a vacuum chamber of a charged particle beam machine
GB4252977 1977-10-12

Publications (2)

Publication Number Publication Date
FR2392492A1 true FR2392492A1 (fr) 1978-12-22
FR2392492B1 FR2392492B1 (fr) 1983-08-12

Family

ID=26256029

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7815687A Granted FR2392492A1 (fr) 1977-05-27 1978-05-26 Dispositif d'etancheite pour la chambre a vide mobile d'une machine a faisceau de particules chargees

Country Status (6)

Country Link
JP (1) JPS5841954B2 (fr)
CA (1) CA1109095A (fr)
DE (1) DE2823321A1 (fr)
FR (1) FR2392492A1 (fr)
IT (1) IT1104654B (fr)
SE (1) SE7806082L (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19623577C2 (de) * 1996-06-13 1998-04-30 Krc Umwelttechnik Gmbh Dichtung für Drehrohre
GB201609995D0 (en) * 2016-06-08 2016-07-20 Aquasium Technology Ltd Shaped welding head

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1367459A (fr) * 1962-03-28 1964-07-24 United Aircraft Corp Dispositif permettant de souder à l'aide d'un faisceau électronique sans chambre à vide
FR2061966A5 (fr) * 1969-10-06 1971-06-25 Peyrot Jean Pierre
GB1292338A (en) * 1968-10-28 1972-10-11 Karl-Heinz Steigwald Sealing means
FR2226888A1 (en) * 1973-04-17 1974-11-15 Field Automation Sarl Flexible snap action joint with sliding access chamber - for entry to controlled atmos along sealed joint path

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE630231A (fr) * 1962-03-28
JPS5334570B2 (fr) * 1973-01-30 1978-09-21
JPS5754235B2 (fr) * 1974-03-06 1982-11-17
JPS5114463A (en) * 1974-07-27 1976-02-04 Toshio Kora Yokusosuiseigyosochi
JPS5523746Y2 (fr) * 1976-02-05 1980-06-06

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1367459A (fr) * 1962-03-28 1964-07-24 United Aircraft Corp Dispositif permettant de souder à l'aide d'un faisceau électronique sans chambre à vide
GB1292338A (en) * 1968-10-28 1972-10-11 Karl-Heinz Steigwald Sealing means
FR2061966A5 (fr) * 1969-10-06 1971-06-25 Peyrot Jean Pierre
FR2226888A1 (en) * 1973-04-17 1974-11-15 Field Automation Sarl Flexible snap action joint with sliding access chamber - for entry to controlled atmos along sealed joint path

Also Published As

Publication number Publication date
JPS5841954B2 (ja) 1983-09-16
SE7806082L (sv) 1978-11-28
IT7849576A0 (it) 1978-05-26
FR2392492B1 (fr) 1983-08-12
JPS54113594A (en) 1979-09-05
DE2823321A1 (de) 1978-12-07
IT1104654B (it) 1985-10-21
CA1109095A (fr) 1981-09-15

Similar Documents

Publication Publication Date Title
ATE2261T1 (de) Profilierter verschlussstreifen fuer kunststoffbeutel und klebeverbindungsverfahren.
DE3370648D1 (en) Flat soft material sealing product, in particular for the production of highly resistant flat seals
GB1415926A (en) Fluid seal
ATE49517T1 (de) Dichtungseinrichtung fuer behandlungsapparat.
GB2076903B (en) Apparatus for controlling the flow of a fluid
ES497692A0 (es) Perfeccionamientos en valvulas moduladoras de la presion delfluido del sistema de frenos de vehiculos
SE8601558D0 (sv) Mekanisk tetning
MY101139A (en) Fixing rigid inserts in a flexible material
GB2012898B (en) Booster utilizing fluid pressure
GB1556916A (en) Sealing system for sealing the gaps between a web of material and a slot in a wall through which the web passes
MX152188A (es) Mejoras en aparato para detectar la presion de un fluido
FR2392492A1 (fr) Dispositif d'etancheite pour la chambre a vide mobile d'une machine a faisceau de particules chargees
MX157282A (es) Mejoras a conjunto de valvula para la regulacion del flujo de un material en particulas hasta o desde un recipiente de presion
ES502165A0 (es) Procedimiento para la fabricacion de material copiativo sen-sible a la presion
FR2289818A2 (fr) Joint perfectionne permettant le transfert d'une bande de matiere entre deux zones de pressions differentes
ES264427Y (es) "valvula de regulacion de presion".
ES510669A0 (es) "maquina para la estanqueizacion de valvulas para sacos".
SE8604703L (sv) Forband och tetningselement for detsamma
ES291688U (es) Valvula esterilizable para recipientes flexibles.
IT7969136A0 (it) Valvola per fluidi con maschio munito di mezzi di tenuta perfezionati
FR2289817A2 (fr) Joint permettant le transfert d'une bande de matiere entre deux zones de pressions differentes tout en reduisant au minimum le passage de l'air d'une zone a l'autre
IT8019463A0 (it) Valvola per fluidi gassosi o liquidi sotto pressione.
BE817274A (fr) Perfectionnements aux dispositifs d'etancheite de terrasse comportant une feuille d'etancheite sous la surface circulable
IT7805140A0 (it) Guarnizione per la tenuta di fluidi in pressione.
IT7806938V0 (it) Guarnizione per la tenuta di fluidi in pressione.

Legal Events

Date Code Title Description
ST Notification of lapse