FR2384233A1 - - Google Patents

Info

Publication number
FR2384233A1
FR2384233A1 FR7807370A FR7807370A FR2384233A1 FR 2384233 A1 FR2384233 A1 FR 2384233A1 FR 7807370 A FR7807370 A FR 7807370A FR 7807370 A FR7807370 A FR 7807370A FR 2384233 A1 FR2384233 A1 FR 2384233A1
Authority
FR
France
Prior art keywords
screen
inspection
detector
interferometer
diagrams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7807370A
Other languages
English (en)
French (fr)
Other versions
FR2384233B1 (en, 2012
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAT RES DEV
National Research Development Corp UK
Original Assignee
NAT RES DEV
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAT RES DEV, National Research Development Corp UK filed Critical NAT RES DEV
Publication of FR2384233A1 publication Critical patent/FR2384233A1/fr
Application granted granted Critical
Publication of FR2384233B1 publication Critical patent/FR2384233B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FR7807370A 1977-03-15 1978-03-14 Expired FR2384233B1 (en, 2012)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB10884/77A GB1593284A (en) 1977-03-15 1977-03-15 Optical inspection

Publications (2)

Publication Number Publication Date
FR2384233A1 true FR2384233A1 (en, 2012) 1978-10-13
FR2384233B1 FR2384233B1 (en, 2012) 1985-05-17

Family

ID=9976097

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7807370A Expired FR2384233B1 (en, 2012) 1977-03-15 1978-03-14

Country Status (5)

Country Link
US (1) US4191476A (en, 2012)
DE (1) DE2811288A1 (en, 2012)
FR (1) FR2384233B1 (en, 2012)
GB (1) GB1593284A (en, 2012)
IT (1) IT1107257B (en, 2012)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4352565A (en) * 1981-01-12 1982-10-05 Rowe James M Speckle pattern interferometer
EP0108497B1 (en) * 1982-10-08 1987-05-13 National Research Development Corporation Irradiative probe system
US4641972A (en) * 1984-09-14 1987-02-10 New York Institute Of Technology Method and apparatus for surface profilometry
US4657394A (en) * 1984-09-14 1987-04-14 New York Institute Of Technology Apparatus and method for obtaining three dimensional surface contours
GB8522820D0 (en) * 1985-09-16 1985-10-23 Montgomery P C Interferometric measurement
US4818110A (en) * 1986-05-06 1989-04-04 Kla Instruments Corporation Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like
GB8613635D0 (en) * 1986-06-05 1986-07-09 Tyrer J R Optical inspection
DE3621631A1 (de) * 1986-06-27 1988-01-14 Hirschmann Geraetebau Gmbh & C Geraet zur abbildung eines objektes auf einem elektrooptischen wandler
US4913547A (en) * 1988-01-29 1990-04-03 Moran Steven E Optically phased-locked speckle pattern interferometer
DE4108062A1 (de) * 1991-03-13 1992-09-17 Man Technologie Gmbh Vorrichtung zur interferometrischen messung von objekten
US5671042A (en) * 1992-02-18 1997-09-23 Illinois Institute Of Technology Holomoire strain analyzer
DE19513234C2 (de) * 1995-04-07 2001-02-22 Ettemeyer Andreas Verfahren und Vorrichtung zur Bestimmung von Phasen und Phasendifferenzen
DE19513233C2 (de) * 1995-04-07 2001-01-04 Andreas Ettemeyer Verfahren und Vorrichtung zur Bestimmung von Phasen und Phasendifferenzen
FR2849245B1 (fr) * 2002-12-20 2006-02-24 Thales Sa Procede d'authentification et d'identification optique d'objets et dispositif de mise en oeuvre
US7397552B2 (en) 2004-09-27 2008-07-08 Applied Materials, Israel, Ltd. Optical inspection with alternating configurations
WO2009120643A2 (en) * 2008-03-22 2009-10-01 Lyle Shirley Dimensional probe and methods of use
US8265375B2 (en) 2006-06-16 2012-09-11 Shirley Lyle G Method and apparatus for remote sensing of objects utilizing radiation speckle
CN102667495A (zh) * 2009-09-28 2012-09-12 喷特路姆科技有限公司 用于远程风感测的方法、装置和系统
CA2805443C (en) 2010-07-24 2016-05-17 Focused Innovation, Inc. Method and apparatus for imaging

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT298830B (de) * 1970-07-10 1972-05-25 Eumig Elek Zitaet Und Metallwa Holographisch-interferometrisches oder moirémetrisches Verfahren
GB1392448A (en) * 1971-06-22 1975-04-30 Nat Res Dev Optical indpection
GB1382523A (en) * 1972-03-15 1975-02-05 Vockenhuber Karl Holographic method and apparatus
GB1460861A (en) * 1974-03-05 1977-01-06 Nat Res Dev Interferrometers

Also Published As

Publication number Publication date
IT1107257B (it) 1985-11-25
FR2384233B1 (en, 2012) 1985-05-17
US4191476A (en) 1980-03-04
DE2811288C2 (en, 2012) 1990-10-31
GB1593284A (en) 1981-07-15
DE2811288A1 (de) 1978-10-19
IT7867556A0 (it) 1978-03-14

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Legal Events

Date Code Title Description
TP Transmission of property