FR2365102A1 - Appareil de detection de l'etat d'une surface conductrice - Google Patents
Appareil de detection de l'etat d'une surface conductriceInfo
- Publication number
- FR2365102A1 FR2365102A1 FR7725331A FR7725331A FR2365102A1 FR 2365102 A1 FR2365102 A1 FR 2365102A1 FR 7725331 A FR7725331 A FR 7725331A FR 7725331 A FR7725331 A FR 7725331A FR 2365102 A1 FR2365102 A1 FR 2365102A1
- Authority
- FR
- France
- Prior art keywords
- conductive surface
- detection
- condition
- nature
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
Abstract
a. Appareil pour détecter la nature et les irrégularités d'une surface conductrice. b. Appareil caractérisé en ce qu'il comprend un moyen de détection destiné à venir sur la surface conductrice, en formant avec celle-ci un condensateur de capacité variable. c. L'invention s'applique à l'examen de la nature de surfaces conductrices.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/723,269 US4103226A (en) | 1976-09-15 | 1976-09-15 | Apparatus for gauging the texture of a conducting surface |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2365102A1 true FR2365102A1 (fr) | 1978-04-14 |
FR2365102B1 FR2365102B1 (fr) | 1984-02-03 |
Family
ID=24905551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7725331A Granted FR2365102A1 (fr) | 1976-09-15 | 1977-08-18 | Appareil de detection de l'etat d'une surface conductrice |
Country Status (7)
Country | Link |
---|---|
US (1) | US4103226A (fr) |
JP (1) | JPS5337453A (fr) |
CA (1) | CA1091781A (fr) |
CH (1) | CH625044A5 (fr) |
DE (1) | DE2740174C2 (fr) |
FR (1) | FR2365102A1 (fr) |
GB (1) | GB1590081A (fr) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4190797A (en) * | 1978-03-31 | 1980-02-26 | Gould Inc. | Capacitive gauging system utilizing a low internal capacitance, high impedance amplifier means |
US4422035A (en) * | 1981-12-11 | 1983-12-20 | Extrude Hone Corporation | Capacitance measurement probe |
US4476430A (en) * | 1982-04-05 | 1984-10-09 | Wright Wade S | Non-contact sensor for determining moving flat steel strip shape profile |
US4646009A (en) * | 1982-05-18 | 1987-02-24 | Ade Corporation | Contacts for conductivity-type sensors |
US4446432A (en) * | 1982-05-27 | 1984-05-01 | Motorola Inc. | Method for determining surface contour of piezoelectric wafers |
DE3433351C1 (de) * | 1984-09-11 | 1986-01-02 | MTU Motoren- und Turbinen-Union München GmbH, 8000 München | Kapazitives Messsystem zur Messung des Abstandes zwischen zwei relativ zueinander beweglichen Teilen |
US4935700A (en) * | 1985-08-09 | 1990-06-19 | Washington Research Foundation | Fringe field capacitive sensor for measuring the size of an opening |
US4814691A (en) * | 1985-08-09 | 1989-03-21 | Washington Research Foundation | Fringe field capacitive sensor for measuring profile of a surface |
US4908574A (en) * | 1986-09-03 | 1990-03-13 | Extrude Hone Corporation | Capacitor array sensors for determining conformity to surface shape |
US4820972A (en) * | 1987-07-02 | 1989-04-11 | Emhart Industries, Inc. | Wall thickness detector |
US5070302A (en) * | 1989-09-05 | 1991-12-03 | Eastman Kodak Company | Capacitance probe for measuring a width of a clearance between parts |
US5030918A (en) * | 1989-11-17 | 1991-07-09 | Modern Controls, Inc. | Portable gauge for measuring thickness variations of thin plastic film |
US5281921A (en) * | 1990-04-24 | 1994-01-25 | Novak James L | Non-contact capacitance based image sensing method and system |
US5432457A (en) * | 1994-01-28 | 1995-07-11 | Northrop Grumman Corporation | Capacitive disk probe |
KR100268423B1 (ko) * | 1998-06-05 | 2000-11-01 | 윤종용 | 반도체 장치에서 사용하기 위한 노광 공정의 포커싱 에러를 줄이기 위한 방법 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB371965A (en) * | 1930-02-05 | 1932-05-05 | Ig Farbenindustrie Ag | A method for measuring or testing the thickness of insulating coatings and linings |
DE900278C (de) * | 1938-02-26 | 1953-12-21 | Johannes Perthen Dr Ing | Vorrichtung zur Pruefung und Messung von Oberflaechen |
GB819533A (en) * | 1956-08-08 | 1959-09-02 | Laszlo Urmenyi | Electronic thickness gauge |
US3716782A (en) * | 1971-06-03 | 1973-02-13 | J Henry | Capacitance gage for measuring small distances |
US3775679A (en) * | 1971-12-09 | 1973-11-27 | Ade Corp | Apparatus and method for direct readout of capacitively gauged dimensions |
GB1436698A (en) * | 1972-02-11 | 1976-05-19 | Bakelite Xylonite Ltd | Apparatus for thickness measurement |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE837468C (de) * | 1949-10-28 | 1952-04-28 | Johannes Perthen Dr Ing | Profilschnellschreiber |
US2649579A (en) * | 1950-02-01 | 1953-08-18 | Standard Oil Dev Co | Detector for seismic exploration |
US2721976A (en) * | 1952-09-10 | 1955-10-25 | Western Electric Co | Capacitance measuring electrode |
GB818345A (en) * | 1956-08-03 | 1959-08-12 | Nat Res Dev | Improvements in or relating to the measurement of surface texture and apparatus therefor |
US3243701A (en) * | 1962-01-03 | 1966-03-29 | American Can Co | Apparatus for capacitive measurement of coating thickness utilizing a square wave source and galvanometer responsive to unidirectional discharge current |
US3387776A (en) * | 1964-08-07 | 1968-06-11 | Rank Organisation Ltd | Gauging device including feedback means applying a signal comparison means to control the level of a detected signal |
US3400331A (en) * | 1965-01-18 | 1968-09-03 | Pratt & Whitney Inc | Gaging device including a probe having a plurality of concentric and coextensive electrodes |
US3519922A (en) * | 1965-12-16 | 1970-07-07 | Nash & Harrison Ltd | Apparatus for detecting abrupt change in the thickness of sheet material |
US3426272A (en) * | 1966-06-17 | 1969-02-04 | Nasa | Device for determining the accuracy of the flare on a flared tube |
GB1125249A (en) * | 1967-08-11 | 1968-08-28 | Standard Telephones Cables Ltd | Vibration detection |
GB1234083A (fr) * | 1968-04-04 | 1971-06-03 | ||
US3805150A (en) * | 1970-08-17 | 1974-04-16 | Ade Corp | Environment immune high precision capacitive gauging system |
US3761810A (en) * | 1971-02-08 | 1973-09-25 | Burrows Equipment Co | Digital reading moisture tester |
US3764899A (en) * | 1972-02-14 | 1973-10-09 | Winzen Research Inc | Apparatus for measuring variations in thickness of elongated samples of thin plastic film |
-
1976
- 1976-09-15 US US05/723,269 patent/US4103226A/en not_active Expired - Lifetime
-
1977
- 1977-08-18 FR FR7725331A patent/FR2365102A1/fr active Granted
- 1977-08-24 CA CA285,415A patent/CA1091781A/fr not_active Expired
- 1977-09-07 DE DE2740174A patent/DE2740174C2/de not_active Expired
- 1977-09-07 GB GB37306/77A patent/GB1590081A/en not_active Expired
- 1977-09-14 JP JP11001977A patent/JPS5337453A/ja active Granted
- 1977-09-15 CH CH1130277A patent/CH625044A5/de not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB371965A (en) * | 1930-02-05 | 1932-05-05 | Ig Farbenindustrie Ag | A method for measuring or testing the thickness of insulating coatings and linings |
DE900278C (de) * | 1938-02-26 | 1953-12-21 | Johannes Perthen Dr Ing | Vorrichtung zur Pruefung und Messung von Oberflaechen |
GB819533A (en) * | 1956-08-08 | 1959-09-02 | Laszlo Urmenyi | Electronic thickness gauge |
US3716782A (en) * | 1971-06-03 | 1973-02-13 | J Henry | Capacitance gage for measuring small distances |
US3775679A (en) * | 1971-12-09 | 1973-11-27 | Ade Corp | Apparatus and method for direct readout of capacitively gauged dimensions |
GB1436698A (en) * | 1972-02-11 | 1976-05-19 | Bakelite Xylonite Ltd | Apparatus for thickness measurement |
Non-Patent Citations (1)
Title |
---|
EXBK/72 * |
Also Published As
Publication number | Publication date |
---|---|
JPS5337453A (en) | 1978-04-06 |
CH625044A5 (fr) | 1981-08-31 |
DE2740174A1 (de) | 1978-03-16 |
DE2740174C2 (de) | 1986-12-11 |
GB1590081A (en) | 1981-05-28 |
CA1091781A (fr) | 1980-12-16 |
US4103226A (en) | 1978-07-25 |
JPS6126001B2 (fr) | 1986-06-18 |
FR2365102B1 (fr) | 1984-02-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2365102A1 (fr) | Appareil de detection de l'etat d'une surface conductrice | |
NL7711929A (nl) | Inrichting voor het meten van de mate van olieverontreiniging in water. | |
FR2435698B1 (fr) | Appareil pour mesurer le contour de certains objets | |
BE856635A (fr) | Methode et appareil pour inspecter et mesurer des endommagements dans une zone inaccessible | |
FR2342875A1 (fr) | Appareil pour nettoyer et/ou peindre des surfaces immergees | |
NL7500281A (nl) | Inrichting voor het bepalen van het profiel en oppervlak. | |
IT7868767A0 (it) | Procedimento ed apparecchio per rivelare la presenza di materie estranee in un liquido | |
BE814045A (fr) | Methode et appareil permettant l'evaluation rapide du potentielde production petroliere de sediments geologiques sur la base de faibles prelevements | |
BE869952A (fr) | Procede pour la mesure et le traitement de resultats de mesure dans des appareils de tomographie transversale equipee d'une calculatrice, et appareil de tomographie muni de moyens pour mettre en oeuvre ledit procede | |
FR2486243B1 (fr) | Procede et appareil pour detecter la presence d'une substance sur la surface d'un liquide | |
FR2339147A1 (fr) | Appareil pour le sechage d'une bande continue | |
BE865045A (fr) | Systeme de jaugeage electro-optique pour mesurer une ou plusieurs dimensions et le profil | |
GB1539844A (en) | Apparatus for continuous measurement of the concentration of oil | |
LU79257A1 (fr) | Systeme de jaugeage electro-optique pour mesurer une ou plusieurs dimensions et le profil | |
BE862000A (fr) | Appareil et procede pour inspecter le contour des articles | |
BE880384A (fr) | Appareil pour les mesures de porosite | |
BE850249A (fr) | Appareil electrodomestique pour le broyage d'aliments | |
BE862085A (fr) | Procede et appareil pour mesurer la concentration de fluides | |
FR2511145B1 (fr) | Appareil gyroscopique pour la determination de la direction du nord | |
FR2466232B1 (fr) | Appareil pour la determination subjective de la refraction | |
FR2276591A1 (fr) | Appareil pour la determination de la teneur en eau d'une huile | |
FR2655148B1 (fr) | Appareil et procede pour determiner les caracteristiques de frottement de matieres en contact. | |
BE856167A (fr) | Procede et appareil de determination de la position et de la surface d'un objet | |
NL7712403A (nl) | Meetinrichting voor fotometrie met vloeibare monsters. | |
BE850432A (fr) | Methode et dispositif pour determiner des caracteristiques petrolieres de sediments geologiques sur la base de faibles prelevements |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |