FR2353997A2 - Resonateur a quartz a electrodes non adherentes au cristal - Google Patents

Resonateur a quartz a electrodes non adherentes au cristal

Info

Publication number
FR2353997A2
FR2353997A2 FR7616289A FR7616289A FR2353997A2 FR 2353997 A2 FR2353997 A2 FR 2353997A2 FR 7616289 A FR7616289 A FR 7616289A FR 7616289 A FR7616289 A FR 7616289A FR 2353997 A2 FR2353997 A2 FR 2353997A2
Authority
FR
France
Prior art keywords
quartz resonator
crystal electrodes
adherent
adherent crystal
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7616289A
Other languages
English (en)
Other versions
FR2353997B2 (fr
Inventor
Raymond Besson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR7601035A priority Critical patent/FR2338607A1/fr
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7616289A priority patent/FR2353997A2/fr
Priority to CA269,228A priority patent/CA1078954A/fr
Priority to DE19772701200 priority patent/DE2701200A1/de
Priority to NLAANVRAGE7700305,A priority patent/NL183689C/xx
Priority to US05/759,488 priority patent/US4135108A/en
Publication of FR2353997A2 publication Critical patent/FR2353997A2/fr
Application granted granted Critical
Publication of FR2353997B2 publication Critical patent/FR2353997B2/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
FR7616289A 1976-01-16 1976-05-31 Resonateur a quartz a electrodes non adherentes au cristal Granted FR2353997A2 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7601035A FR2338607A1 (fr) 1976-01-16 1976-01-16 Resonateur a quartz a electrodes non adherentes au cristal
FR7616289A FR2353997A2 (fr) 1976-01-16 1976-05-31 Resonateur a quartz a electrodes non adherentes au cristal
CA269,228A CA1078954A (fr) 1976-01-16 1977-01-06 Resonateur a quartz a electrodes non adherentes au cristal
DE19772701200 DE2701200A1 (de) 1976-01-16 1977-01-13 Piezoelektrischer schwinger
NLAANVRAGE7700305,A NL183689C (nl) 1976-01-16 1977-01-13 Piezo-electrische resonator.
US05/759,488 US4135108A (en) 1976-01-16 1977-01-14 Quartz resonator with electrodes that do not adhere to the crystal

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7601035A FR2338607A1 (fr) 1976-01-16 1976-01-16 Resonateur a quartz a electrodes non adherentes au cristal
FR7616289A FR2353997A2 (fr) 1976-01-16 1976-05-31 Resonateur a quartz a electrodes non adherentes au cristal

Publications (2)

Publication Number Publication Date
FR2353997A2 true FR2353997A2 (fr) 1977-12-30
FR2353997B2 FR2353997B2 (fr) 1980-08-08

Family

ID=26219245

Family Applications (2)

Application Number Title Priority Date Filing Date
FR7601035A Granted FR2338607A1 (fr) 1976-01-16 1976-01-16 Resonateur a quartz a electrodes non adherentes au cristal
FR7616289A Granted FR2353997A2 (fr) 1976-01-16 1976-05-31 Resonateur a quartz a electrodes non adherentes au cristal

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FR7601035A Granted FR2338607A1 (fr) 1976-01-16 1976-01-16 Resonateur a quartz a electrodes non adherentes au cristal

Country Status (5)

Country Link
US (1) US4135108A (fr)
CA (1) CA1078954A (fr)
DE (1) DE2701200A1 (fr)
FR (2) FR2338607A1 (fr)
NL (1) NL183689C (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2415914A1 (fr) * 1978-01-27 1979-08-24 France Etat Resonateur piezoelectrique a cristal autosuspendu
EP0010046A1 (fr) * 1978-10-09 1980-04-16 ETAT-FRANCAIS représenté par le Délégué Général pour l' Armement Résonateur piézoélectrique
FR2437110A1 (fr) * 1978-09-25 1980-04-18 United Technologies Corp Dispositif pour onde acoustique de surface capsule sous vide et methode de fabrication
FR2441960A1 (fr) * 1978-11-16 1980-06-13 Suisse Horlogerie Resonateur piezoelectrique travaillant en cisaillement d'epaisseur
EP0023171A1 (fr) * 1979-07-18 1981-01-28 ETAT-FRANCAIS représenté par le Délégué Général pour l' Armement Oscillateur haute fréquence autothermostaté
EP0060087A1 (fr) * 1981-03-05 1982-09-15 Yoshiaki Nagaura Appareil pour la fabrication d'un article en forme d'une lentille
FR2558999A1 (fr) * 1984-01-27 1985-08-02 Cepe Procede de fabrication d'un resonateur autosuspendu
FR2734964A1 (fr) * 1995-06-02 1996-12-06 Ecole Nale Sup Artes Metiers Resonateur piezoelectrique a ondes de volume.
FR2776143A1 (fr) * 1998-03-10 1999-09-17 Bva Ind Dispositif de fixation d'un resonateur a quartz a electrodes non adherentes

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478693A (en) * 1977-12-05 1979-06-22 Matsushima Kogyo Co Ltd Crystal vibrator
US4221986A (en) * 1978-06-30 1980-09-09 Laboratoires De Physicochimie Appliquees Issec Piezoelectric resonator with improved suspension
FR2445029A1 (fr) * 1978-12-19 1980-07-18 France Etat Resonateur piezoelectrique a tiroir
DE3263495D1 (en) * 1981-02-28 1985-06-20 Kinseki Ltd Piezoelectric oscillator device
US4381471A (en) * 1981-03-23 1983-04-26 The United States Of America As Represented By The Secretary Of The Army SC-Cut quartz resonators with suppressed b-mode
US4720651A (en) * 1982-06-10 1988-01-19 The United States Of America As Represented By The Secretary Of The Army Resonator insensitive to paraxial accelerations
FR2531532A1 (fr) * 1982-08-05 1984-02-10 Flopetrol Capteur piezo-electrique, notamment pour la mesure de pressions
FR2545669B1 (fr) * 1983-05-03 1985-08-09 France Etat Armement Oscillateur a quartz compense en temperature
FR2552952B1 (fr) * 1983-09-30 1985-11-08 Cepe Resonateur auto-suspendu de haute surtension
FR2552950B1 (fr) * 1983-09-30 1985-11-08 Cepe Resonateur de faible sensibilite
JPS6141215A (ja) * 1984-07-31 1986-02-27 Nippon Dempa Kogyo Co Ltd 水晶振動子
US4631437A (en) * 1985-01-10 1986-12-23 The United States Of America As Represented By The Secretary Of The Army Stress compensated piezoelectric crystal device
FR2577362B1 (fr) * 1985-02-13 1987-04-17 Ebauchesfabrik Eta Ag Procede de fabrication de resonateurs a quartz a haute frequence
FR2583578B1 (fr) * 1985-06-14 1987-08-14 France Etat Armement Resonateur piezo-electrique a extremum de sensibilite vis-a-vis des contraintes exterieures de pression
DE3761731D1 (de) * 1986-11-04 1990-03-29 Siemens Ag Ultraschall-sensor.
KR920700481A (ko) * 1989-02-27 1992-02-19 빈센트 죠셉 로너 수정 발진 공진기
US4999819A (en) * 1990-04-18 1991-03-12 The Pennsylvania Research Corporation Transformed stress direction acoustic transducer
US5747857A (en) * 1991-03-13 1998-05-05 Matsushita Electric Industrial Co., Ltd. Electronic components having high-frequency elements and methods of manufacture therefor
US5668057A (en) * 1991-03-13 1997-09-16 Matsushita Electric Industrial Co., Ltd. Methods of manufacture for electronic components having high-frequency elements
GB2260642B (en) * 1991-10-19 1995-02-08 Northern Telecom Ltd Crystal resonator device
US5198716A (en) * 1991-12-09 1993-03-30 The United States Of America As Represented By The United States Department Of Energy Micro-machined resonator
US5250870A (en) * 1992-03-25 1993-10-05 Motorola, Inc. Ultra-thin surface mount crystal package
JPH06291587A (ja) * 1992-07-08 1994-10-18 Matsushita Electric Ind Co Ltd 圧電振動子
JPH06350376A (ja) * 1993-01-25 1994-12-22 Matsushita Electric Ind Co Ltd 気密封止された圧電デバイスおよび気密封止パッケージ
DE69429848T2 (de) * 1993-11-01 2002-09-26 Matsushita Electric Ind Co Ltd Elektronische Anordnung und Verfahren zur Herstellung
EP0657900B1 (fr) * 1993-12-06 1998-03-25 Matsushita Electric Industrial Co., Ltd. Structure magnétique hybride et procédé de sa fabrication
US5686779A (en) * 1995-03-01 1997-11-11 The United States Of America As Represented By The Secretary Of The Army High sensitivity temperature sensor and sensor array
US5744902A (en) * 1995-05-16 1998-04-28 The United States Of America As Represented By The Secretary Of The Army Chemical and biological sensor based on microresonators
US6016025A (en) * 1997-05-15 2000-01-18 M-Tron Industries, Inc. Selected overtone resonator with channels
JP3731348B2 (ja) * 1998-06-09 2006-01-05 松下電器産業株式会社 圧電振動子
US6411013B1 (en) * 1999-12-30 2002-06-25 Honeywell International Inc. Microactuator array with integrally formed package
US6646364B1 (en) 2000-07-11 2003-11-11 Honeywell International Inc. MEMS actuator with lower power consumption and lower cost simplified fabrication
US6628048B2 (en) * 2000-11-29 2003-09-30 Samsung Electro-Mechanics Co., Ltd. Crystal oscillator with improved shock resistance
JP2002365123A (ja) * 2001-06-11 2002-12-18 Yamato Scale Co Ltd 水晶振動子を用いた荷重センサ
JP2004080221A (ja) * 2002-08-13 2004-03-11 Fujitsu Media Device Kk 弾性波デバイス及びその製造方法
JP4997780B2 (ja) * 2005-05-16 2012-08-08 セイコーエプソン株式会社 圧電振動片の製造方法
FR2962614B1 (fr) 2010-07-06 2012-07-27 Onera (Off Nat Aerospatiale) Module de decouplage mecanique d'un resonateur a grand coefficient de qualite
RU2444122C1 (ru) * 2010-09-20 2012-02-27 Юрий Сергеевич Иванченко Кварцевый резонатор
US20130235001A1 (en) * 2012-03-06 2013-09-12 Qualcomm Mems Technologies, Inc. Piezoelectric resonator with airgap
WO2016121466A1 (fr) * 2015-01-28 2016-08-04 株式会社村田製作所 Résonateur à quartz et son procédé de fabrication, et dispositif de résonateur à quartz
WO2017011872A1 (fr) * 2015-07-20 2017-01-26 The University Of Queensland Dispositif optique accordable
US11005446B2 (en) 2019-05-07 2021-05-11 Fox Enterprises, Inc. Resonators and devices with a pixel electrode operating across a gap
US10931284B2 (en) 2019-05-07 2021-02-23 Fox Enterprises, Inc. Resonators and devices with pixel based electrodes operating across a gap
CN110836871A (zh) * 2019-11-08 2020-02-25 江苏科技大学 一种生物分子检测的测量池

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1908320A (en) * 1929-12-09 1933-05-09 Rca Corp Piezo-electric crystal holder
US2076060A (en) * 1934-11-06 1937-04-06 Telefunken Gmbh Piezoelectric crystal holder
US2542651A (en) * 1949-03-08 1951-02-20 Rca Corp Temperature compensated piezoelectric crystal holder
US2677775A (en) * 1951-12-26 1954-05-04 Premier Res Lab Inc Retaining frame piezoelectric crystal mounting
US2807731A (en) * 1954-01-27 1957-09-24 Standard Electronics Corp Crystal assembly and mounting means therefor
US3339091A (en) * 1964-05-25 1967-08-29 Hewlett Packard Co Crystal resonators

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2415914A1 (fr) * 1978-01-27 1979-08-24 France Etat Resonateur piezoelectrique a cristal autosuspendu
FR2437110A1 (fr) * 1978-09-25 1980-04-18 United Technologies Corp Dispositif pour onde acoustique de surface capsule sous vide et methode de fabrication
EP0010046A1 (fr) * 1978-10-09 1980-04-16 ETAT-FRANCAIS représenté par le Délégué Général pour l' Armement Résonateur piézoélectrique
FR2438939A1 (fr) * 1978-10-09 1980-05-09 France Etat Bi-resonateur piezoelectrique
FR2441960A1 (fr) * 1978-11-16 1980-06-13 Suisse Horlogerie Resonateur piezoelectrique travaillant en cisaillement d'epaisseur
US4451754A (en) * 1978-11-16 1984-05-29 Dryan-Fordahl Technologies S.A. High frequency piezoelectric resonator
FR2462055A1 (fr) * 1979-07-18 1981-02-06 France Etat Oscillateur haute frequence autothermostate
EP0023171A1 (fr) * 1979-07-18 1981-01-28 ETAT-FRANCAIS représenté par le Délégué Général pour l' Armement Oscillateur haute fréquence autothermostaté
EP0060087A1 (fr) * 1981-03-05 1982-09-15 Yoshiaki Nagaura Appareil pour la fabrication d'un article en forme d'une lentille
FR2558999A1 (fr) * 1984-01-27 1985-08-02 Cepe Procede de fabrication d'un resonateur autosuspendu
EP0151067A2 (fr) * 1984-01-27 1985-08-07 Compagnie D'electronique Et De Piezo-Electricite - C.E.P.E. Procédé de fabrication d'un résonateur auto-suspendu
EP0151067A3 (fr) * 1984-01-27 1985-09-18 Compagnie D'electronique Et De Piezo-Electricite - C.E.P.E. Procédé de fabrication d'un résonateur auto-suspendu
FR2734964A1 (fr) * 1995-06-02 1996-12-06 Ecole Nale Sup Artes Metiers Resonateur piezoelectrique a ondes de volume.
FR2776143A1 (fr) * 1998-03-10 1999-09-17 Bva Ind Dispositif de fixation d'un resonateur a quartz a electrodes non adherentes

Also Published As

Publication number Publication date
CA1078954A (fr) 1980-06-03
NL183689C (nl) 1988-12-16
NL7700305A (nl) 1977-07-19
FR2338607A1 (fr) 1977-08-12
FR2338607B1 (fr) 1980-05-23
US4135108A (en) 1979-01-16
FR2353997B2 (fr) 1980-08-08
DE2701200A1 (de) 1977-07-21
DE2701200C2 (fr) 1987-11-26

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