FR2353649A1 - METHOD AND DEVICE FOR THE DEPOSIT OF REGULAR LAYERS ON SURFACE SUBSTRATES - Google Patents

METHOD AND DEVICE FOR THE DEPOSIT OF REGULAR LAYERS ON SURFACE SUBSTRATES

Info

Publication number
FR2353649A1
FR2353649A1 FR7716889A FR7716889A FR2353649A1 FR 2353649 A1 FR2353649 A1 FR 2353649A1 FR 7716889 A FR7716889 A FR 7716889A FR 7716889 A FR7716889 A FR 7716889A FR 2353649 A1 FR2353649 A1 FR 2353649A1
Authority
FR
France
Prior art keywords
deposit
surface substrates
regular layers
regular
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7716889A
Other languages
French (fr)
Other versions
FR2353649B3 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2353649A1 publication Critical patent/FR2353649A1/en
Application granted granted Critical
Publication of FR2353649B3 publication Critical patent/FR2353649B3/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7716889A 1976-06-02 1977-06-02 METHOD AND DEVICE FOR THE DEPOSIT OF REGULAR LAYERS ON SURFACE SUBSTRATES Granted FR2353649A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762624700 DE2624700A1 (en) 1976-06-02 1976-06-02 METHOD AND DEVICE FOR UNIFORM COATING OF FLAT SUBSTRATES

Publications (2)

Publication Number Publication Date
FR2353649A1 true FR2353649A1 (en) 1977-12-30
FR2353649B3 FR2353649B3 (en) 1980-07-18

Family

ID=5979603

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7716889A Granted FR2353649A1 (en) 1976-06-02 1977-06-02 METHOD AND DEVICE FOR THE DEPOSIT OF REGULAR LAYERS ON SURFACE SUBSTRATES

Country Status (5)

Country Link
CH (1) CH630417A5 (en)
DE (1) DE2624700A1 (en)
FR (1) FR2353649A1 (en)
GB (1) GB1529418A (en)
IT (1) IT1076194B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2413478A1 (en) * 1977-12-27 1979-07-27 Coulter Systems Corp METHOD AND DEVICE FOR SIMULTANEOUS APPLICATION OF A COATING ON SEVERAL CYLINDERS BY CATHODIC SPRAYING
FR2754830A1 (en) * 1996-10-23 1998-04-24 Leybold Systems Gmbh VACUUM COATING DEVICE FOR COATING A SUBSTRATE BY ALL ROTATIONS BY ROTATING THE SUBSTRATE IN THE MATERIAL FLOW

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3067724D1 (en) * 1980-02-07 1984-06-14 Matsushita Electric Ind Co Ltd Method of forming a glass spacer in the magnetic gap of a magnetic head
ATE7714T1 (en) * 1980-07-01 1984-06-15 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And METHOD FOR MASS PRODUCTION OF ALLOYS AND APPARATUS THEREOF.
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
GB2234988B (en) * 1989-08-16 1993-12-08 Qpl Limited Improvements in vacuum deposition machines
EP1167566B1 (en) * 2000-06-22 2011-01-26 Panasonic Electric Works Co., Ltd. Apparatus for and method of vacuum vapor deposition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2413478A1 (en) * 1977-12-27 1979-07-27 Coulter Systems Corp METHOD AND DEVICE FOR SIMULTANEOUS APPLICATION OF A COATING ON SEVERAL CYLINDERS BY CATHODIC SPRAYING
FR2754830A1 (en) * 1996-10-23 1998-04-24 Leybold Systems Gmbh VACUUM COATING DEVICE FOR COATING A SUBSTRATE BY ALL ROTATIONS BY ROTATING THE SUBSTRATE IN THE MATERIAL FLOW

Also Published As

Publication number Publication date
IT1076194B (en) 1985-04-27
GB1529418A (en) 1978-10-18
FR2353649B3 (en) 1980-07-18
CH630417A5 (en) 1982-06-15
DE2624700A1 (en) 1977-12-15

Similar Documents

Publication Publication Date Title
BE853200A (en) METHOD FOR FORMING A METAL OR METAL COMPOUND COATING ON A FACE OF A GLASS SUBSTRATE AND DEVICE SUITABLE TO BE USED TO FORM SUCH COATING
FR2348492A1 (en) METHOD AND APPARATUS FOR THE IMMUNOLOGICAL DETERMINATION OF AMINOGLYCOSIDIC ANTIBIOTICS
IT1002650B (en) METHOD AND APPARATUS FOR THE DEPOSIT OF THIN FILM ON A SUBSTRATE
PT69199A (en) METHOD AND DEVICE FOR MANUFACTURING TABLES IN STUC
IL53661A0 (en) Method and system for transferring liquid media particularly liquid metal
FR2340207A1 (en) DEVICE AND METHOD FOR PRINTING INFORMATION ON A SURFACE
BE850471A (en) METHOD AND DEVICE FOR CLEANING CATHODIC MESHES OR CATHODIC PLATES
JPS5257691A (en) Method and device for cleaning spilled oil on ice sea
FR2337850A1 (en) METHOD AND DEVICE FOR STOPPING THE PROPAGATION OF CRACKS IN A PIPELINE
IL51555A (en) Method of increasing mass transfer in liquid media
BE754184A (en) INORGANIC COMPOSITION FOR COATING AND METHOD FOR FORMING A PROTECTIVE COATING ON A SUBSTRATE
FR2502643B1 (en) APPARATUS AND METHOD FOR MOLECULAR JET DEPOSITION ON MULTIPLE SUBSTRATES
FR2353649A1 (en) METHOD AND DEVICE FOR THE DEPOSIT OF REGULAR LAYERS ON SURFACE SUBSTRATES
FR2285714A1 (en) METHOD AND DEVICE FOR FORMING EPITAXIC LAYERS
FR2329323A1 (en) METHOD AND DEVICE FOR THE OPERATION OF A FILTER-PRESS FOLLOWING AN AIR TANK
FR2342947A1 (en) METHOD AND DEVICE FOR BOMBING GLASS SHEETS
FR2570085B1 (en) DEVICE FOR FORMING THIN FILMS ON SUBSTRATES
FR2289251A1 (en) METHOD AND DEVICE FOR THE ELECTROSTATIC DEPOSIT OF A PROTECTIVE LAYER ON A PART
GB2016727B (en) Transmissive surface layer effect electro-optic device
JPS52151628A (en) Method and device for sucking scum
PT65269B (en) METHOD AND DEVICE FOR FORMATION OF OXYDEMETALLIC DEPOSITION ON GLASS
BE816000A (en) METHOD AND DEVICE FOR FORMING AN OXIDE COATING ON GLASSWARE
BE861511A (en) BRICK AND METHOD AND DEVICE FOR MAKING IT
JPS572899A (en) Method and device for electroplating electroconductive substrate
FR2313470A1 (en) METHOD AND DEVICE FOR THE ELIMINATION OF IMPURITIES ON CARDES

Legal Events

Date Code Title Description
ST Notification of lapse