FR2346853B1 - - Google Patents
Info
- Publication number
- FR2346853B1 FR2346853B1 FR7704273A FR7704273A FR2346853B1 FR 2346853 B1 FR2346853 B1 FR 2346853B1 FR 7704273 A FR7704273 A FR 7704273A FR 7704273 A FR7704273 A FR 7704273A FR 2346853 B1 FR2346853 B1 FR 2346853B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2621—Circuits therefor for testing field effect transistors, i.e. FET's
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2644—Adaptations of individual semiconductor devices to facilitate the testing thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/672,687 US4024561A (en) | 1976-04-01 | 1976-04-01 | Field effect transistor monitors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2346853A1 FR2346853A1 (fr) | 1977-10-28 |
| FR2346853B1 true FR2346853B1 (enExample) | 1979-03-09 |
Family
ID=24699595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7704273A Granted FR2346853A1 (fr) | 1976-04-01 | 1977-02-07 | Appareils de controle de caracteristiques dimensionnelles de dispositifs semi-conducteurs |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4024561A (enExample) |
| JP (1) | JPS52120687A (enExample) |
| FR (1) | FR2346853A1 (enExample) |
| GB (1) | GB1510777A (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4100486A (en) * | 1977-03-11 | 1978-07-11 | International Business Machines Corporation | Monitor for semiconductor diffusion operations |
| US4399205A (en) * | 1981-11-30 | 1983-08-16 | International Business Machines Corporation | Method and apparatus for determining photomask alignment |
| US4642491A (en) * | 1983-06-24 | 1987-02-10 | International Business Machines Corporation | Single transistor driver circuit |
| EP0359866A1 (de) * | 1988-09-23 | 1990-03-28 | Siemens Aktiengesellschaft | Verfahren und Halbleiteranordnung zum Messen der Stromaufnahme einer monolithisch integrierten Leistungsstruktur |
| US5500805A (en) * | 1993-10-06 | 1996-03-19 | Nsoft Systems, Inc. | Multiple source equalization design utilizing metal interconnects for gate arrays and embedded arrays |
| US5563801A (en) * | 1993-10-06 | 1996-10-08 | Nsoft Systems, Inc. | Process independent design for gate array devices |
| US5510999A (en) * | 1993-10-06 | 1996-04-23 | Nsoft Systems, Inc. | Multiple source equalization design for gate arrays and embedded arrays |
| EP0685881A1 (en) * | 1994-05-31 | 1995-12-06 | AT&T Corp. | Linewidth control apparatus and method |
| US5619420A (en) * | 1995-05-04 | 1997-04-08 | Lsi Logic Corporation | Semiconductor cell having a variable transistor width |
| KR100272659B1 (ko) | 1997-06-28 | 2000-12-01 | 김영환 | 반도체 소자의 금속배선 선폭 측정방법 |
| US7183623B2 (en) * | 2001-10-02 | 2007-02-27 | Agere Systems Inc. | Trimmed integrated circuits with fuse circuits |
| US6747445B2 (en) | 2001-10-31 | 2004-06-08 | Agere Systems Inc. | Stress migration test structure and method therefor |
| US6620635B2 (en) * | 2002-02-20 | 2003-09-16 | International Business Machines Corporation | Damascene resistor and method for measuring the width of same |
| US6815237B1 (en) * | 2003-09-29 | 2004-11-09 | Rockwell Scientific Licensing, Llc | Testing apparatus and method for determining an etch bias associated with a semiconductor-processing step |
| US7514940B1 (en) * | 2006-12-13 | 2009-04-07 | National Semiconductor Corporation | System and method for determining effective channel dimensions of metal oxide semiconductor devices |
| US8013400B1 (en) | 2008-04-21 | 2011-09-06 | National Semiconductor Corporation | Method and system for scaling channel length |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH399588A (de) * | 1962-07-17 | 1965-09-30 | Siemens Ag | Verfahren zum Bestimmen des spezifischen Widerstandes einer dünnen Halbleiterschicht |
| US3974443A (en) * | 1975-01-02 | 1976-08-10 | International Business Machines Corporation | Conductive line width and resistivity measuring system |
-
1976
- 1976-04-01 US US05/672,687 patent/US4024561A/en not_active Expired - Lifetime
-
1977
- 1977-02-07 FR FR7704273A patent/FR2346853A1/fr active Granted
- 1977-03-08 GB GB9653/77A patent/GB1510777A/en not_active Expired
- 1977-03-11 JP JP2616577A patent/JPS52120687A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52120687A (en) | 1977-10-11 |
| GB1510777A (en) | 1978-05-17 |
| JPS549029B2 (enExample) | 1979-04-20 |
| US4024561A (en) | 1977-05-17 |
| FR2346853A1 (fr) | 1977-10-28 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |