FR2341668A1 - Procede pour deposer en phase vapeur une pellicule d'oxyde de cerium constituant une couche de blocage dans la couche photosensible d'un tube analyseur d'image - Google Patents

Procede pour deposer en phase vapeur une pellicule d'oxyde de cerium constituant une couche de blocage dans la couche photosensible d'un tube analyseur d'image

Info

Publication number
FR2341668A1
FR2341668A1 FR7704857A FR7704857A FR2341668A1 FR 2341668 A1 FR2341668 A1 FR 2341668A1 FR 7704857 A FR7704857 A FR 7704857A FR 7704857 A FR7704857 A FR 7704857A FR 2341668 A1 FR2341668 A1 FR 2341668A1
Authority
FR
France
Prior art keywords
depositing
oxide film
vapor phase
cerium oxide
image analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7704857A
Other languages
English (en)
French (fr)
Other versions
FR2341668B1 (nl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2341668A1 publication Critical patent/FR2341668A1/fr
Application granted granted Critical
Publication of FR2341668B1 publication Critical patent/FR2341668B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233—Manufacture of photoelectric screens or charge-storage screens

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
FR7704857A 1976-02-20 1977-02-18 Procede pour deposer en phase vapeur une pellicule d'oxyde de cerium constituant une couche de blocage dans la couche photosensible d'un tube analyseur d'image Granted FR2341668A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51017080A JPS585849B2 (ja) 1976-02-20 1976-02-20 酸化セリウム薄膜の蒸着方法

Publications (2)

Publication Number Publication Date
FR2341668A1 true FR2341668A1 (fr) 1977-09-16
FR2341668B1 FR2341668B1 (nl) 1980-02-01

Family

ID=11933988

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7704857A Granted FR2341668A1 (fr) 1976-02-20 1977-02-18 Procede pour deposer en phase vapeur une pellicule d'oxyde de cerium constituant une couche de blocage dans la couche photosensible d'un tube analyseur d'image

Country Status (5)

Country Link
JP (1) JPS585849B2 (nl)
DE (1) DE2706896C3 (nl)
FR (1) FR2341668A1 (nl)
GB (1) GB1563964A (nl)
NL (1) NL169758C (nl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0579018A1 (de) * 1992-07-02 1994-01-19 Balzers Aktiengesellschaft Verfahren zur Herstellung einer Metalloxidschicht, Vakuumbehandlungsanlage hierfür sowie mit mindestens einer Metalloxidschicht beschichteter Teil

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945998A (nl) * 1972-09-11 1974-05-02
US3983076A (en) * 1973-07-02 1976-09-28 Energy Conversion Devices, Inc. N-type amorphous semiconductor materials

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0579018A1 (de) * 1992-07-02 1994-01-19 Balzers Aktiengesellschaft Verfahren zur Herstellung einer Metalloxidschicht, Vakuumbehandlungsanlage hierfür sowie mit mindestens einer Metalloxidschicht beschichteter Teil
US5618575A (en) * 1992-07-02 1997-04-08 Balzers Aktiengesellschaft Process and apparatus for the production of a metal oxide layer

Also Published As

Publication number Publication date
DE2706896B2 (de) 1979-05-31
NL7701757A (nl) 1977-08-23
JPS52100396A (en) 1977-08-23
DE2706896A1 (de) 1977-08-25
NL169758B (nl) 1982-03-16
FR2341668B1 (nl) 1980-02-01
DE2706896C3 (de) 1980-01-17
NL169758C (nl) 1982-08-16
GB1563964A (en) 1980-04-02
JPS585849B2 (ja) 1983-02-02

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