FR2340622B1 - - Google Patents

Info

Publication number
FR2340622B1
FR2340622B1 FR7700642A FR7700642A FR2340622B1 FR 2340622 B1 FR2340622 B1 FR 2340622B1 FR 7700642 A FR7700642 A FR 7700642A FR 7700642 A FR7700642 A FR 7700642A FR 2340622 B1 FR2340622 B1 FR 2340622B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7700642A
Other languages
French (fr)
Other versions
FR2340622A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/656,756 external-priority patent/US4075045A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2340622A1 publication Critical patent/FR2340622A1/fr
Application granted granted Critical
Publication of FR2340622B1 publication Critical patent/FR2340622B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/30DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
FR7700642A 1976-02-09 1977-01-05 Procede de fabrication d'un transistor a effet de champ a grille au silicium et d'un condensateur; cellule ainsi obtenue Granted FR2340622A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/656,756 US4075045A (en) 1976-02-09 1976-02-09 Method for fabricating FET one-device memory cells with two layers of polycrystalline silicon and fabrication of integrated circuits containing arrays of the memory cells charge storage capacitors utilizing five basic pattern deliberating steps
US05/702,247 US4085498A (en) 1976-02-09 1976-07-02 Fabrication of integrated circuits containing enhancement-mode FETs and depletion-mode FETs with two layers of polycrystalline silicon utilizing five basic pattern delineating steps

Publications (2)

Publication Number Publication Date
FR2340622A1 FR2340622A1 (fr) 1977-09-02
FR2340622B1 true FR2340622B1 (en:Method) 1980-10-24

Family

ID=27097257

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7700642A Granted FR2340622A1 (fr) 1976-02-09 1977-01-05 Procede de fabrication d'un transistor a effet de champ a grille au silicium et d'un condensateur; cellule ainsi obtenue

Country Status (1)

Country Link
FR (1) FR2340622A1 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2842545C2 (de) * 1978-09-29 1980-07-31 Siemens Ag, 1000 Berlin Und 8000 Muenchen Halbleiterspeicher mit Depletion-Varaktoren als Speicherkondensatoren

Also Published As

Publication number Publication date
FR2340622A1 (fr) 1977-09-02

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Legal Events

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