FR2330141B3 - - Google Patents

Info

Publication number
FR2330141B3
FR2330141B3 FR7632832A FR7632832A FR2330141B3 FR 2330141 B3 FR2330141 B3 FR 2330141B3 FR 7632832 A FR7632832 A FR 7632832A FR 7632832 A FR7632832 A FR 7632832A FR 2330141 B3 FR2330141 B3 FR 2330141B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7632832A
Other languages
French (fr)
Other versions
FR2330141A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2330141A1 publication Critical patent/FR2330141A1/fr
Application granted granted Critical
Publication of FR2330141B3 publication Critical patent/FR2330141B3/fr
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
FR7632832A 1975-10-29 1976-10-29 Procede et dispositif pour l'exploitation d'une pompe a vide du type a evaporation de titane Granted FR2330141A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752548302 DE2548302A1 (de) 1975-10-29 1975-10-29 Verfahren und vorrichtung zum betrieb einer titanverdampferpumpe

Publications (2)

Publication Number Publication Date
FR2330141A1 FR2330141A1 (fr) 1977-05-27
FR2330141B3 true FR2330141B3 (de) 1979-07-13

Family

ID=5960313

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7632832A Granted FR2330141A1 (fr) 1975-10-29 1976-10-29 Procede et dispositif pour l'exploitation d'une pompe a vide du type a evaporation de titane

Country Status (4)

Country Link
DE (1) DE2548302A1 (de)
FR (1) FR2330141A1 (de)
GB (1) GB1522048A (de)
IT (1) IT1075879B (de)

Also Published As

Publication number Publication date
FR2330141A1 (fr) 1977-05-27
IT1075879B (it) 1985-04-22
GB1522048A (en) 1978-08-23
DE2548302A1 (de) 1977-05-05

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