FR2327036B1 - - Google Patents
Info
- Publication number
- FR2327036B1 FR2327036B1 FR7530771A FR7530771A FR2327036B1 FR 2327036 B1 FR2327036 B1 FR 2327036B1 FR 7530771 A FR7530771 A FR 7530771A FR 7530771 A FR7530771 A FR 7530771A FR 2327036 B1 FR2327036 B1 FR 2327036B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Silicon Compounds (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7530771A FR2327036A1 (en) | 1975-10-08 | 1975-10-08 | Modified silica sol for polishing silicon and germanium - remaining stable without depolymerisation at high pH for rapid polishing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7530771A FR2327036A1 (en) | 1975-10-08 | 1975-10-08 | Modified silica sol for polishing silicon and germanium - remaining stable without depolymerisation at high pH for rapid polishing |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2327036A1 FR2327036A1 (en) | 1977-05-06 |
FR2327036B1 true FR2327036B1 (en) | 1983-04-01 |
Family
ID=9160940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7530771A Granted FR2327036A1 (en) | 1975-10-08 | 1975-10-08 | Modified silica sol for polishing silicon and germanium - remaining stable without depolymerisation at high pH for rapid polishing |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2327036A1 (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2892797A (en) * | 1956-02-17 | 1959-06-30 | Du Pont | Process for modifying the properties of a silica sol and product thereof |
US3170273A (en) * | 1963-01-10 | 1965-02-23 | Monsanto Co | Process for polishing semiconductor materials |
DE1752163A1 (en) * | 1968-04-11 | 1971-05-13 | Wacker Chemie Gmbh | Process for polishing semiconductor surfaces |
US3807979A (en) * | 1972-05-08 | 1974-04-30 | Philadelphia Quartz Co | Quaternary ammonium silicate for polishing silicon metal |
-
1975
- 1975-10-08 FR FR7530771A patent/FR2327036A1/en active Granted
Also Published As
Publication number | Publication date |
---|---|
FR2327036A1 (en) | 1977-05-06 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |