FR2325076B1 - - Google Patents

Info

Publication number
FR2325076B1
FR2325076B1 FR7623079A FR7623079A FR2325076B1 FR 2325076 B1 FR2325076 B1 FR 2325076B1 FR 7623079 A FR7623079 A FR 7623079A FR 7623079 A FR7623079 A FR 7623079A FR 2325076 B1 FR2325076 B1 FR 2325076B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7623079A
Other languages
French (fr)
Other versions
FR2325076A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2325076A1 publication Critical patent/FR2325076A1/en
Application granted granted Critical
Publication of FR2325076B1 publication Critical patent/FR2325076B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
FR7623079A 1975-09-20 1976-07-20 Sensitisers for phenolic resin based photoresist materials - comprise substd. or unsubstd. aryl-sulphonamides, cyclic aromatic imides, etc. Granted FR2325076A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752541982 DE2541982A1 (en) 1975-09-20 1975-09-20 PROCESS FOR Awareness Raising A POSITIVE WORKING PHOTORESIST AND PHOTORESIS MATERIAL

Publications (2)

Publication Number Publication Date
FR2325076A1 FR2325076A1 (en) 1977-04-15
FR2325076B1 true FR2325076B1 (en) 1978-05-05

Family

ID=5956974

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7623079A Granted FR2325076A1 (en) 1975-09-20 1976-07-20 Sensitisers for phenolic resin based photoresist materials - comprise substd. or unsubstd. aryl-sulphonamides, cyclic aromatic imides, etc.

Country Status (3)

Country Link
JP (1) JPS5240126A (en)
DE (1) DE2541982A1 (en)
FR (1) FR2325076A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU8021782A (en) * 1981-02-20 1982-08-26 Polychrome Corp. Non-silver positive working radiation sensitive compositions
US5145763A (en) * 1990-06-29 1992-09-08 Ocg Microelectronic Materials, Inc. Positive photoresist composition
GB9105750D0 (en) * 1991-03-19 1991-05-01 Minnesota Mining & Mfg Speed stabilised positive-acting photoresist compositions
JPH0649906A (en) * 1992-01-17 1994-02-22 Misawa Homes Co Ltd Construction method for medium and high-story building

Also Published As

Publication number Publication date
DE2541982A1 (en) 1977-03-24
FR2325076A1 (en) 1977-04-15
JPS5240126A (en) 1977-03-28

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Legal Events

Date Code Title Description
ST Notification of lapse