FR2322452A1 - ELECTRONIC MICROSCOPE - Google Patents

ELECTRONIC MICROSCOPE

Info

Publication number
FR2322452A1
FR2322452A1 FR7626413A FR7626413A FR2322452A1 FR 2322452 A1 FR2322452 A1 FR 2322452A1 FR 7626413 A FR7626413 A FR 7626413A FR 7626413 A FR7626413 A FR 7626413A FR 2322452 A1 FR2322452 A1 FR 2322452A1
Authority
FR
France
Prior art keywords
electronic microscope
microscope
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7626413A
Other languages
French (fr)
Other versions
FR2322452B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2322452A1 publication Critical patent/FR2322452A1/en
Application granted granted Critical
Publication of FR2322452B1 publication Critical patent/FR2322452B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7626413A 1975-09-01 1976-09-01 ELECTRONIC MICROSCOPE Granted FR2322452A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7510276A NL7510276A (en) 1975-09-01 1975-09-01 ELECTRONIC MICROSKOP.

Publications (2)

Publication Number Publication Date
FR2322452A1 true FR2322452A1 (en) 1977-03-25
FR2322452B1 FR2322452B1 (en) 1980-12-12

Family

ID=19824390

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7626413A Granted FR2322452A1 (en) 1975-09-01 1976-09-01 ELECTRONIC MICROSCOPE

Country Status (6)

Country Link
JP (1) JPS5847825B2 (en)
CA (1) CA1061477A (en)
DE (1) DE2637753A1 (en)
FR (1) FR2322452A1 (en)
GB (1) GB1563014A (en)
NL (1) NL7510276A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423861A1 (en) * 1978-04-17 1979-11-16 Philips Nv ELECTRONIC MICROSCOPE

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope
DE69939309D1 (en) 1999-03-31 2008-09-25 Advantest Corp Particle beam device for obliquely observing a sample

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3087057A (en) * 1958-11-29 1963-04-23 Zeiss Carl Means for varying the picture brightness in an electron microscope

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623272B2 (en) * 1973-11-19 1981-05-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3087057A (en) * 1958-11-29 1963-04-23 Zeiss Carl Means for varying the picture brightness in an electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423861A1 (en) * 1978-04-17 1979-11-16 Philips Nv ELECTRONIC MICROSCOPE

Also Published As

Publication number Publication date
JPS5847825B2 (en) 1983-10-25
GB1563014A (en) 1980-03-19
DE2637753A1 (en) 1977-03-03
NL7510276A (en) 1977-03-03
CA1061477A (en) 1979-08-28
JPS5230154A (en) 1977-03-07
FR2322452B1 (en) 1980-12-12

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Legal Events

Date Code Title Description
DR Decision of the appeal court due to an appeal at law against decisions of the director of the inpi, except decision of lapse
ST Notification of lapse