FR2312110A1 - Procede et dispositif de microscopie electronique a modulation d'intensite du faisceau d'electrons primaires - Google Patents

Procede et dispositif de microscopie electronique a modulation d'intensite du faisceau d'electrons primaires

Info

Publication number
FR2312110A1
FR2312110A1 FR7516205A FR7516205A FR2312110A1 FR 2312110 A1 FR2312110 A1 FR 2312110A1 FR 7516205 A FR7516205 A FR 7516205A FR 7516205 A FR7516205 A FR 7516205A FR 2312110 A1 FR2312110 A1 FR 2312110A1
Authority
FR
France
Prior art keywords
flux intensity
frequency modulated
intensity signal
sample
signal controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7516205A
Other languages
English (en)
French (fr)
Other versions
FR2312110B1 (enrdf_load_stackoverflow
Inventor
Claude Le Gressus
Daniel Massignon
Rene Sopizet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7516205A priority Critical patent/FR2312110A1/fr
Publication of FR2312110A1 publication Critical patent/FR2312110A1/fr
Application granted granted Critical
Publication of FR2312110B1 publication Critical patent/FR2312110B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7516205A 1975-05-23 1975-05-23 Procede et dispositif de microscopie electronique a modulation d'intensite du faisceau d'electrons primaires Granted FR2312110A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7516205A FR2312110A1 (fr) 1975-05-23 1975-05-23 Procede et dispositif de microscopie electronique a modulation d'intensite du faisceau d'electrons primaires

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7516205A FR2312110A1 (fr) 1975-05-23 1975-05-23 Procede et dispositif de microscopie electronique a modulation d'intensite du faisceau d'electrons primaires

Publications (2)

Publication Number Publication Date
FR2312110A1 true FR2312110A1 (fr) 1976-12-17
FR2312110B1 FR2312110B1 (enrdf_load_stackoverflow) 1977-12-02

Family

ID=9155623

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7516205A Granted FR2312110A1 (fr) 1975-05-23 1975-05-23 Procede et dispositif de microscopie electronique a modulation d'intensite du faisceau d'electrons primaires

Country Status (1)

Country Link
FR (1) FR2312110A1 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0166814A1 (de) * 1984-05-30 1986-01-08 Siemens Aktiengesellschaft Verfahren und Vorrichtung zur Detektion und Abbildung eines Messpunkts, der eine Spannung wenigstens einer bestimmten Frequenz führt
EP0201692A1 (de) * 1985-03-22 1986-11-20 Siemens Aktiengesellschaft Verfahren zur Auswertung einer Messspannung mittels einer bandbreitenbegrenzten Auswerteschaltung und Anordnung zur Durchführung des Verfahrens
WO2025099373A1 (fr) 2023-11-08 2025-05-15 Stellantis Auto Sas Dispositif de régulation d'entrée d'air régulée de véhicule automobile

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
*REVUE US: "APPLIED PHYSICS LETTERS", VOL. 16, NO. 7, 1ER OCTOBRE 1971, PAGES 232 A 235 *
ARTICLE DE O.C. WELLS "LOW-LOSS IMAGE FOR SURFACE SCANNING ELECTRON MICROSCOPE") *
ARTICLE DE T.R. TOUW ET G.V. LUKIANOFF "FREQUENCY-MODULATED SCANNING ELECTRON MICROSCOPY" *
REVUE GB: "THE BRITISH JOURNAL OF PHOTOGRAPHY",VOL. 118 NO. 5768, 5 FEBRUARY 1971, PAGES 121 A 124 ET 130, ARTICLE DE IAN M. WATT "LARGER THAN LIFE AND TWICE AS NATURAL" *
REVUE US: "IBM TECHNICAL DISCLOSURE BULLETIN", VOL. 15, NO. 7, DECEMBRE 1972, PAGES 2298 ET 2299 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0166814A1 (de) * 1984-05-30 1986-01-08 Siemens Aktiengesellschaft Verfahren und Vorrichtung zur Detektion und Abbildung eines Messpunkts, der eine Spannung wenigstens einer bestimmten Frequenz führt
EP0201692A1 (de) * 1985-03-22 1986-11-20 Siemens Aktiengesellschaft Verfahren zur Auswertung einer Messspannung mittels einer bandbreitenbegrenzten Auswerteschaltung und Anordnung zur Durchführung des Verfahrens
WO2025099373A1 (fr) 2023-11-08 2025-05-15 Stellantis Auto Sas Dispositif de régulation d'entrée d'air régulée de véhicule automobile

Also Published As

Publication number Publication date
FR2312110B1 (enrdf_load_stackoverflow) 1977-12-02

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