FR2286414A1 - Positive resist images of poly-alkenyl ketones - made by irradiation by light or electron beams - Google Patents
Positive resist images of poly-alkenyl ketones - made by irradiation by light or electron beamsInfo
- Publication number
- FR2286414A1 FR2286414A1 FR7525147A FR7525147A FR2286414A1 FR 2286414 A1 FR2286414 A1 FR 2286414A1 FR 7525147 A FR7525147 A FR 7525147A FR 7525147 A FR7525147 A FR 7525147A FR 2286414 A1 FR2286414 A1 FR 2286414A1
- Authority
- FR
- France
- Prior art keywords
- poly
- positive resist
- irradiation
- light
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Production of an image on a high-resolution radiation sensitive positive resist material, by comprises (1) applying a film of a poly-(alpha-lower-alkenyl ketone) on a substrate (2) irradiating in a pre-determined pattern, and (3) treating the film with a solvent for the breakdown product formed in the irradiated areas. Used in mfr. of integrated printed circuits, printing plates etc. Post hardening of the photo-resist image is not required. The image has a high resolution, below the film thickness e.g. 0.5 um lines with the same separation can be obtained in 1 um films.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US50959474A | 1974-09-26 | 1974-09-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2286414A1 true FR2286414A1 (en) | 1976-04-23 |
Family
ID=24027317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7525147A Withdrawn FR2286414A1 (en) | 1974-09-26 | 1975-08-07 | Positive resist images of poly-alkenyl ketones - made by irradiation by light or electron beams |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS5148279A (en) |
DE (1) | DE2536299A1 (en) |
FR (1) | FR2286414A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2847764A1 (en) * | 1977-11-04 | 1979-05-10 | Tokyo Ohka Kogyo Co Ltd | METHOD OF FORMING AN ULTRA FINE PATTERN BY UV EXPOSURE |
DE2911286A1 (en) * | 1978-03-22 | 1979-10-04 | Tokyo Ohka Kogyo Co Ltd | LIGHT-SENSITIVE COMPOSITIONS |
EP0061689A1 (en) * | 1981-03-27 | 1982-10-06 | Hitachi, Ltd. | Radiation sensitive polymer materials |
EP0154932A2 (en) * | 1984-03-09 | 1985-09-18 | Hewlett-Packard Company | Multilayer photoresist process |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5359367A (en) * | 1976-11-10 | 1978-05-29 | Hitachi Ltd | Formation of electron beam resist image |
JPS5475989A (en) * | 1977-11-30 | 1979-06-18 | Hitachi Ltd | Pattern production method |
JPS5511301A (en) * | 1978-06-12 | 1980-01-26 | Fujitsu Ltd | Method of forming fine pattern |
JPS63291053A (en) * | 1987-05-25 | 1988-11-28 | Nippon Zeon Co Ltd | Positive type photoresist composition |
-
1975
- 1975-08-07 FR FR7525147A patent/FR2286414A1/en not_active Withdrawn
- 1975-08-14 DE DE19752536299 patent/DE2536299A1/en active Pending
- 1975-08-19 JP JP50099847A patent/JPS5148279A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2847764A1 (en) * | 1977-11-04 | 1979-05-10 | Tokyo Ohka Kogyo Co Ltd | METHOD OF FORMING AN ULTRA FINE PATTERN BY UV EXPOSURE |
DE2911286A1 (en) * | 1978-03-22 | 1979-10-04 | Tokyo Ohka Kogyo Co Ltd | LIGHT-SENSITIVE COMPOSITIONS |
EP0061689A1 (en) * | 1981-03-27 | 1982-10-06 | Hitachi, Ltd. | Radiation sensitive polymer materials |
EP0154932A2 (en) * | 1984-03-09 | 1985-09-18 | Hewlett-Packard Company | Multilayer photoresist process |
EP0154932A3 (en) * | 1984-03-09 | 1986-02-05 | Hewlett-Packard Company | Multilayer photoresist process |
Also Published As
Publication number | Publication date |
---|---|
DE2536299A1 (en) | 1976-04-08 |
JPS5148279A (en) | 1976-04-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |