FR2284980A1 - Perfectionnements aux microscopes electroniques a balayage et analogues - Google Patents

Perfectionnements aux microscopes electroniques a balayage et analogues

Info

Publication number
FR2284980A1
FR2284980A1 FR7432368A FR7432368A FR2284980A1 FR 2284980 A1 FR2284980 A1 FR 2284980A1 FR 7432368 A FR7432368 A FR 7432368A FR 7432368 A FR7432368 A FR 7432368A FR 2284980 A1 FR2284980 A1 FR 2284980A1
Authority
FR
France
Prior art keywords
sweep
main
sweeps
line
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7432368A
Other languages
English (en)
French (fr)
Other versions
FR2284980B1 (OSRAM
Inventor
Edmond Vicario
Pierre Morin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Priority to FR7432368A priority Critical patent/FR2284980A1/fr
Publication of FR2284980A1 publication Critical patent/FR2284980A1/fr
Application granted granted Critical
Publication of FR2284980B1 publication Critical patent/FR2284980B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7432368A 1974-09-16 1974-09-16 Perfectionnements aux microscopes electroniques a balayage et analogues Granted FR2284980A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7432368A FR2284980A1 (fr) 1974-09-16 1974-09-16 Perfectionnements aux microscopes electroniques a balayage et analogues

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7432368A FR2284980A1 (fr) 1974-09-16 1974-09-16 Perfectionnements aux microscopes electroniques a balayage et analogues

Publications (2)

Publication Number Publication Date
FR2284980A1 true FR2284980A1 (fr) 1976-04-09
FR2284980B1 FR2284980B1 (OSRAM) 1979-02-02

Family

ID=9143425

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7432368A Granted FR2284980A1 (fr) 1974-09-16 1974-09-16 Perfectionnements aux microscopes electroniques a balayage et analogues

Country Status (1)

Country Link
FR (1) FR2284980A1 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0200333A3 (en) * 1985-04-24 1987-09-02 Micrion Limited Partnership Ion beam processing method and apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0200333A3 (en) * 1985-04-24 1987-09-02 Micrion Limited Partnership Ion beam processing method and apparatus

Also Published As

Publication number Publication date
FR2284980B1 (OSRAM) 1979-02-02

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Legal Events

Date Code Title Description
ST Notification of lapse