FR2273588B1 - - Google Patents

Info

Publication number
FR2273588B1
FR2273588B1 FR7515085A FR7515085A FR2273588B1 FR 2273588 B1 FR2273588 B1 FR 2273588B1 FR 7515085 A FR7515085 A FR 7515085A FR 7515085 A FR7515085 A FR 7515085A FR 2273588 B1 FR2273588 B1 FR 2273588B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7515085A
Other languages
French (fr)
Other versions
FR2273588A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2273588A1 publication Critical patent/FR2273588A1/fr
Application granted granted Critical
Publication of FR2273588B1 publication Critical patent/FR2273588B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/261—Bombardment with radiation to produce a nuclear reaction transmuting chemical elements
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/20—Doping by irradiation with electromagnetic waves or by particle radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7515085A 1974-06-04 1975-05-14 Procede pour le dopage de materiaux conducteurs ou semiconducteurs au moyen d'atomes etrangers Granted FR2273588A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2426877 1974-06-04

Publications (2)

Publication Number Publication Date
FR2273588A1 FR2273588A1 (fr) 1976-01-02
FR2273588B1 true FR2273588B1 (id) 1977-07-08

Family

ID=5917253

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7515085A Granted FR2273588A1 (fr) 1974-06-04 1975-05-14 Procede pour le dopage de materiaux conducteurs ou semiconducteurs au moyen d'atomes etrangers

Country Status (3)

Country Link
BE (1) BE829661A (id)
FR (1) FR2273588A1 (id)
IT (1) IT1038362B (id)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5707879A (en) * 1997-01-08 1998-01-13 Reinitz; Karl Neutron detector based on semiconductor materials

Also Published As

Publication number Publication date
FR2273588A1 (fr) 1976-01-02
BE829661A (fr) 1975-09-15
IT1038362B (it) 1979-11-20

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Legal Events

Date Code Title Description
ST Notification of lapse