IT1038362B - Procedimento per drogare materiali conduttori o semiconduttori con eterdatomi - Google Patents

Procedimento per drogare materiali conduttori o semiconduttori con eterdatomi

Info

Publication number
IT1038362B
IT1038362B IT2362275A IT2362275A IT1038362B IT 1038362 B IT1038362 B IT 1038362B IT 2362275 A IT2362275 A IT 2362275A IT 2362275 A IT2362275 A IT 2362275A IT 1038362 B IT1038362 B IT 1038362B
Authority
IT
Italy
Prior art keywords
herdatomes
druging
conductive
procedure
semiconductive materials
Prior art date
Application number
IT2362275A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT1038362B publication Critical patent/IT1038362B/it

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/261Bombardment with radiation to produce a nuclear reaction transmuting chemical elements
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/20Doping by irradiation with electromagnetic waves or by particle radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT2362275A 1974-06-04 1975-05-22 Procedimento per drogare materiali conduttori o semiconduttori con eterdatomi IT1038362B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2426877 1974-06-04

Publications (1)

Publication Number Publication Date
IT1038362B true IT1038362B (it) 1979-11-20

Family

ID=5917253

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2362275A IT1038362B (it) 1974-06-04 1975-05-22 Procedimento per drogare materiali conduttori o semiconduttori con eterdatomi

Country Status (3)

Country Link
BE (1) BE829661A (it)
FR (1) FR2273588A1 (it)
IT (1) IT1038362B (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5707879A (en) * 1997-01-08 1998-01-13 Reinitz; Karl Neutron detector based on semiconductor materials

Also Published As

Publication number Publication date
FR2273588B1 (it) 1977-07-08
BE829661A (fr) 1975-09-15
FR2273588A1 (fr) 1976-01-02

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