FR2271173B1 - - Google Patents

Info

Publication number
FR2271173B1
FR2271173B1 FR7514887A FR7514887A FR2271173B1 FR 2271173 B1 FR2271173 B1 FR 2271173B1 FR 7514887 A FR7514887 A FR 7514887A FR 7514887 A FR7514887 A FR 7514887A FR 2271173 B1 FR2271173 B1 FR 2271173B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7514887A
Other versions
FR2271173A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of FR2271173A1 publication Critical patent/FR2271173A1/fr
Application granted granted Critical
Publication of FR2271173B1 publication Critical patent/FR2271173B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
FR7514887A 1974-05-13 1975-05-13 Expired FR2271173B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US46917974A 1974-05-13 1974-05-13

Publications (2)

Publication Number Publication Date
FR2271173A1 FR2271173A1 (fr) 1975-12-12
FR2271173B1 true FR2271173B1 (fr) 1979-04-06

Family

ID=23862763

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7514887A Expired FR2271173B1 (fr) 1974-05-13 1975-05-13

Country Status (4)

Country Link
JP (1) JPS50155423A (fr)
DE (1) DE2520774A1 (fr)
FR (1) FR2271173B1 (fr)
GB (1) GB1498266A (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620739A1 (de) * 1976-05-11 1977-12-01 Wacker Chemitronic Verfahren zur herstellung von hochreinem silicium
GB2028289B (en) * 1978-08-18 1982-09-02 Schumacher Co J C Producing silicon
KR880000618B1 (ko) * 1985-12-28 1988-04-18 재단법인 한국화학연구소 초단파 가열 유동상 반응에 의한 고순도 다결정 실리콘의 제조 방법
JPH01282194A (ja) * 1988-01-19 1989-11-14 Osaka Titanium Co Ltd 単結晶製造方法
JPH0742080Y2 (ja) * 1990-07-12 1995-09-27 川崎重工業株式会社 高温ガスを用いる流動層炉
DE10060469A1 (de) * 2000-12-06 2002-07-04 Solarworld Ag Verfahren zur Herstellung von hochreinem, granularem Silizium
NO329968B1 (no) * 2007-08-17 2011-01-31 Silansil As Anordning og fremgangsmate for kompaktering av silisiumpulver

Also Published As

Publication number Publication date
JPS50155423A (fr) 1975-12-15
FR2271173A1 (fr) 1975-12-12
GB1498266A (en) 1978-01-18
DE2520774A1 (de) 1975-11-27

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Legal Events

Date Code Title Description
ST Notification of lapse