FR2269648B1 - - Google Patents

Info

Publication number
FR2269648B1
FR2269648B1 FR7513510A FR7513510A FR2269648B1 FR 2269648 B1 FR2269648 B1 FR 2269648B1 FR 7513510 A FR7513510 A FR 7513510A FR 7513510 A FR7513510 A FR 7513510A FR 2269648 B1 FR2269648 B1 FR 2269648B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7513510A
Other languages
French (fr)
Other versions
FR2269648A1 (en:Method
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LE POLT I
Original Assignee
LE POLT I
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LE POLT I filed Critical LE POLT I
Publication of FR2269648A1 publication Critical patent/FR2269648A1/fr
Application granted granted Critical
Publication of FR2269648B1 publication Critical patent/FR2269648B1/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
FR7513510A 1974-04-30 1975-04-30 Expired FR2269648B1 (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU2019987A SU515884A1 (ru) 1974-04-30 1974-04-30 Криогенный сверхвысоковакуумный насос

Publications (2)

Publication Number Publication Date
FR2269648A1 FR2269648A1 (en:Method) 1975-11-28
FR2269648B1 true FR2269648B1 (en:Method) 1978-02-24

Family

ID=20583231

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7513510A Expired FR2269648B1 (en:Method) 1974-04-30 1975-04-30

Country Status (5)

Country Link
US (1) US4009585A (en:Method)
DE (1) DE2519170C2 (en:Method)
FR (1) FR2269648B1 (en:Method)
GB (1) GB1502877A (en:Method)
SU (1) SU515884A1 (en:Method)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
SU1698481A1 (ru) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный адсорбционный насос
US6330801B1 (en) 1999-06-11 2001-12-18 Francis J. Whelan Method and system for increasing cryopump capacity
US6367267B1 (en) * 2000-09-22 2002-04-09 Applied Epi, Inc. Integrated phase separator for ultra high vacuum system
US6718775B2 (en) 2002-07-30 2004-04-13 Applied Epi, Inc. Dual chamber cooling system with cryogenic and non-cryogenic chambers for ultra high vacuum system
US7526917B1 (en) * 2008-08-11 2009-05-05 Hoffman John C Gas diffusion vacuum device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3188785A (en) * 1960-04-29 1965-06-15 James W Butler Vacuum cold trap
US3144756A (en) * 1962-07-23 1964-08-18 Ion Physics Corp Vacuum system cooling trap
US3216207A (en) * 1962-10-15 1965-11-09 Continental Oil Co Cold trap assembly for high vacuum systems
US3379132A (en) * 1965-08-16 1968-04-23 Integral Process Syst Inc Cryogenic pump
US3360949A (en) * 1965-09-20 1968-01-02 Air Reduction Cryopumping configuration
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump

Also Published As

Publication number Publication date
GB1502877A (en) 1978-03-08
FR2269648A1 (en:Method) 1975-11-28
SU515884A1 (ru) 1976-05-30
US4009585A (en) 1977-03-01
DE2519170C2 (de) 1982-02-04
DE2519170A1 (de) 1975-11-20

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Legal Events

Date Code Title Description
ST Notification of lapse